Curriculum

SEMESTER 1

MST technologies and processes
Microelectronics
Micro-mechanics
MST design laboratory I
Optical microsystems
Sensors
Probability and statistics

SEMESTER 2

Assembly and packaging technology
Dynamics of MEMS
Micro-actuators
Biomedical microsystems
Micro-fluidics
MST design laboratory II
Signal processing

SEMESTER 3

Master's thesis
Microsystem concentrations

SEMESTER 4

Master's thesis
Microsystem concentrations

Concentrations are offered in the following areas:

• Circuits and systems
• Design and simulation
• Life sciences: Biomedical engineering
• Life sciences: Lab-on-a-chip
• Materials
• Process engineering
• Sensors and actuators

For more detailed information, please check out the web pages of the Faculty of Engineering.