• Prof. Dr. Leonard Reindl - Professor for Electrical Measurement Technology
• Prof. Dr. Yiannos Manoli - Professor for Microelectronics
• Prof. Dr. Margit Zacharias - Professor for Nanotechnology
• Prof. Dr. Oliver Ambacher - Professor for Compound Semiconductor Microsystems
• Prof. Dr. Ulrich Egert - Professor for Biomicrotechnology
• Prof. Dr. Karsten Buse - Professor for Optical Systems

Emeritus Professors:

• Prof. Dr. Walter Kuntz † - Professor emeritus for Electrical Measurement Technology
• Prof. Dr. Wolfgang Menz - Professor emeritus for Process Technology
• Prof. Dr. Christoph Ament - Professor emeritus for Systems Theory