Analysis of microsystems

Details

Type of course: lecture (Vorlesung); required within the Master Microsystems Engineering
Credits: 3 ECTS
Time and Room: Mondays, 10 am - 12 pm, 101 00 014 (Summer 2011)

Description

XPS, TEM, FTIR, UPS, SEM, AFM, SPR, GIR, ATR, STM?? Got it?

The performance of microsytems is often dominate by the nature of the surfaces involved. This course honors the great importance of surfaces and interfaces in microsystems engineering by introducing the most common techniques for surface analysis.

Materials

Slides Summer 2011

These slides are mostly identical to the 2010 versions.

Introduction & Surface Forces (pdf)
Sorption phenomena & Wetting of Surfaces (pdf)
Chemical composition of Surfaces (pdf)
XRR and Ellipsometry (pdf)
SPS (pdf)
QCM (pdf)
AFM (pdf)
SEM and TEM (pdf)

Older Slides used in previous years:

XPS (pdf)
SIMS (pdf)
FTIR (pdf)
Wetting (pdf)

Exercises (2008):

Sheet 1 (pdf)

Exams

Exam 2008 (pdf)
Exam 2010 (pdf)

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