Editor

Institute of Microsystem Technology
Institute director: Prof. Dr. Roland Zengerle
Albert-Ludwigs-University of Freiburg
Georges-Koehler-Allee 106
79110 Freiburg

Telefon: [++49] 0761 / 203 - 7477
Telefax: [++49] 0761 / 203 - 7539

General liability:
The University of Freiburg is a corporation of public law represented legally by the rector, Professor Dr. Hans-Jochen Schiewer

Other liabilities are subject to the public information policy (IAO) [de]

Sales tax identification number: DE 142116817

Copyright

Inhalt des Webangebotes

Das Institut für Mikrosystemtechnik (IMTEK) ist bemüht, ihr Webangebot stets aktuell und inhaltlich richtig sowie vollständig anzubieten. Dennoch ist das Auftreten von Fehlern nicht völlig auszuschließen.

Das IMTEK übernimmt keine Haftung für die Aktualität, die inhaltliche Richtigkeit sowie für die Vollständigkeit der in ihrem Webangebot eingestellten Informationen, es sei denn die Fehler wurden vorsätzlich oder grob fahrlässig aufgenommen. Dies bezieht sich auf eventuelle Schäden materieller oder ideeller Art Dritter, die durch die Nutzung dieses Webangebotes verursacht wurden.

Copyright

Copyright (c) 2002, University of Freiburg.
All rights reserved.

All information published on this website (layout, texts, pictures, tables, etc.) are protected by copyright. Any use of this information not allowed by copyright laws requires the prior explicit approval of the Office of Public Affairs. This applies especially for the distribution, alteration, translation, copying, processing or reproduction of information on database or other electronic media and systems. The photocopying and downloading of web pages for private, scientific, non-commercial use is acceptable.

We openly allow and encourage the citation of our documents and web pages and the creation of links to our website.

Copyright Laws

The internet service team of the University of Freiburg makes every effort to observe all copyright laws to which the illustrations, sound files, video sequences, and texts on our site are subject, to use illustrations, sound files, video sequences, and texts of its own creation, or to use illustrations, sound files, video sequences, and texts from the public domain. All registered trademarks and brand names on this website are subject without restrictions to any regulations pertaining to the registration and property rights of their respective owners. One should not assume that trademarks are not protected by the rights of third parties on the basis of the simple fact that they are named on this website!

Photographs

Unless otherwise indicated, the copyrights of all photographs on this website may be obtained either from

• head of research groups
• head of IMTEK
• or the Office of Public Affairs.

Disclaimer

Disclaimer for content created by employees of the University of Freiburg:

The content of this website has been researched and implemented with a high degree of care. However, the possibility of errors in the processing and implementation cannot be fully excluded. Please send any remarks or corrections to head of institute or directly to wwwimtek@imtek.de.

Despite our care in designing this website, we can assume liability neither for its correctness and completeness, nor for information on it that is not current. More specifically, the IMTEK assumes no liability for damages or other consequences directly or indirectly resulting from the use of content on this website.

Disclaimer for cross-references and links:

In accordance with common law, the IMTEK is responsible for contents created by persons associated with the institute. Such content does not include cross-references to content from other websites. This foreign content neither originates from the IMTEK, nor does the IMTEK possess any influence over the content of such third party sites.

The content of foreign sites with which the IMTEK is associated by links does not reflect the opinion of the IMTEK, serving merely as a source of further information and the description of connections.

These remarks hold for all links and references on this website as well as for entries in guest books set up by the IMTEK, discussion forums, and mailing lists. Legally responsible for illegal, incorrect, or incomplete content or especially for damages incurred as a result of the use of such information is solely the owner of the page the reference refers to.

Privacy Policy

Sofern innerhalb des Internetangebotes die Möglichkeit der Eingabe von persönlichen Daten (E-Mailadresse, Namen, Anschriften) besteht, erfolgt diese freiwillig. Die IMTEK erklärt ausdrücklich, dass sie diese Daten nicht an Dritte weitergibt.

Access to the website:

Our informational pages are made available exclusively on the central web servers of the computing center and the administration of the IMTEK.

Every time you access the website this information is documented on a protocol file. The data on this protocol file make no reference to individual persons. We are thus not able to track which pages you have accessed or which files you have retrieved.

The following data are saved in the protocol file:

• the name of the file retrieved
• the date and time of retrieval
• message as to whether the retrieval was successful
• The IP address

The saved data is used to optimize our internet service. This information is not passed on to third parties for commercial or non-commercial uses.

Rechtswirksamkeit

Dieser Haftungsausschluss ist Teil des Internetangebotes der IMTEK. Sofern einzelne Formulierungen oder Teile dieses Textes der geltenden Rechtslage nicht mehr oder nicht mehr vollständig entsprechen, bleiben die übrigen Teile dieser Erklärung davon unberührt.