Projects
Test structures for epi-poly layers
Project description
We develop and fabricate MEMS-based test-structures to analyse the mechanical behaviour of thin-films made of polysilicon using a micro-tensile test
Start/End of project
18.08.2006 until 15.11.2008
Project manager
Prof. Dr. Oliver Paul
Contact person
Prof. Dr. Oliver Paul
Phone:+49 761 203 7191
Email:paul@imtek.de
Funding
Robert Bosch GmbH