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Publikationen



Originalarbeiten in wissenschaftlichen Fachzeitschriften

Jahre: 2019 | 2018 | 2017 | 2016 | 2015 | 2014 | 2013 | 2012 | 2011 | 2010 | 2009 | 2008 | 2007 | 2006 | 2005 | 2004 | 2003 | 2002 | 2001 | 2000 | 1999 | 1998
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    2019

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    2018

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    • Fiath R, Raducanu B C, Musa S, Andrei A, Lopez C M, van Hoof C, Ruther P, Aarts A, Horvath D, Ulbert I
      A silicon-based neural probe with densely-packed low-impedance titanium nitride microelectrodes for ultrahigh-resolution in vivo recordings
      2018 Biosens Bioelectron, Band: 106, Seiten: 86 - 92
    • Heizmann S, Kilias A, Ruther P, Egert U, Asplund M
      Active Control of Dye Release for Neuronal Tracing Using PEDOT-PSS Coated Electrodes
      2018 Ieee T Neur Sys Reh, Band: 26, Seiten: 299 - 306
    • Sayed Herbawi A, Christ O, Kiessner L, Mottahi S, Hofmann U G, Paul O, Ruther P
      CMOS Neural Probe with 1600 Close-packed Recording Sites and 32 Analog Output Channels
      2018 J Microelectromech S
    • Hoch K, Pothof F, Becker F, Paul O, Ruther P
      Development, Modeling, Fabrication, and Characterization of a Magnetic, Micro-Spring-Suspended System for the Safe Electrical Interconnection of Neural Implants
      2018 Micromachines-basel, Band: 9, Nummer: 9, Ergänzungsband: 424, Seiten: 1 - 19
    • Klein E, Gossler C, Paul O, Ruther P
      High-density mLED-based otpical cochlear implant with improved thermomechanical behavior
      2018 Front Neurosci-switz, Band: 12, Seiten: 659 - 659
    • Fiath R, Hofer K T, Csikos V, Horvath D, Nanasi T, Toth K, Pothof F, Böhler C, Asplund M, Ruther P, Ulbert I
      Long-term recording performance and biocompatibility of chronically implanted cylindrically-shaped, polymer-based neural interfaces
      2018 Biomed Eng Online, Seiten: 301 - 315
    • Sileo L, Bitzenhofer S H, Spagnolo B, Pöpplau J A, Holzhammer T, Pisanello M, Pisano F, Bellistri E, Maglie E, De Vittorio M, Ruther P, Hanganu-Opatz I L, Pisanello F
      Tapered fibers combined with a multi-electrode array for optogenetics in mouse medial prefrontal cortex
      2018 Front Neurosci-switz, Band: 12, Ergänzungsband: e771
    • Dimitriadis G, Neto J P, Aarts A, Alexandru A, Ballini M, Battaglia F, Calcaterra L, David F, Fiath R, Frazao J, Geerts J, Gentet L J, Van Helleputte N, Holzhammer T, van Hoof C, Horvath D, Lopes G, Maris E, Marques-Smith A, Marton G, Meszena D, Mitra S, Musa S, Neves H, Nogueira J, Orban G A, Pothof F, Putzeys J, Raducanu B, Ruther P, Schroeder T, Singer W, Tiesinga P, Ulbert I, Wang S, Welkenhuysen M, Kampff A R
      Why not record from every channel with a CMOS scanning probe?
      2018 bioRxiv

    2017

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    2016

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    2015

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    • Nomura M, Kage Y, Müller D, Moser D, Paul O
      Electrical and thermal properties of polycrystalline Si thin films with phononic crystal nanopatterning for thermoelectric applications
      2015 Appl Phys Lett, Band: 106, Nummer: 223, Ergänzungsband: 106, Seiten: 1 - 4
    • Nomura M, Kage Y, Nakagawa J, Hori T, Maire J, Shiomi J, Anufriev R, Moser D, Paul O
      Impeded thermal transport in Si multiscale hierarchical architectures with phononic crystal nanostructures
      2015 Phys Rev B, Band: 91, Nummer: 205, Ergänzungsband: 422, Seiten: 1 - 6
    • Larramendy F, Blatche M.C., Mazenq L, Laborde A, Temple-Boyer P, Paul O
      Microchannel-connected SU-8 honeycombs by single-step projection photolithography for positioning cells on silicon oxide nanopillar arrays
      2015 J Micromech Microeng, Band: 25, Seiten: 1 - 9
    • Ruther P, Paul O
      New approaches for CMOS-based devices for large-scale neural recording
      2015 ScienceDirect, Band: 32, Seiten: 31 - 37
    • Nomura M, Nakagawa J, Kage Y, Maire J, Moser D, Paul O
      Thermal phonon transport in silicon nanowires and two-dimensional phononic crystal nanostructures
      2015 Appl Phys Lett, Band: 106, Nummer: 143, Ergänzungsband: 102, Seiten: 1 - 4

    2014

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    • Bonini L, Maranesi M, Livi A, Bruni S, Fogassi L, Holzhammer T, Paul O, Ruther P
      Application of floating silicon-based linear multielectrode aarays for acute recording of single neuron activity in awake behaving monkeys
      2014 Biomed Tech, Band: 59(4), Seiten: 273 - 281
    • Spieth S, Schumacher A, Trenkle F, Brett O, Seidl K, Herwik S, Kisban S, Ruther P, Paul O, Aarts A.A.A, Neves H.P., Rich P.D., Theobald D.E., Holztman T, Dalley J.W., Verhoef B-E, Janssen P, Zengerle R
      Approaches for drug delivery with intracortical probes
      2014 Biomed Tech, Band: 59(4), Seiten: 291 - 303
    • Vittoriosi A, Brandner J J, Ruther P, Paul O, Dittmeyer R
      Design and Characterization of Integrated Microsensors for Heat Transfer Studies in Microchannels
      2014 Exp Heat Transfer, Band: 27, Seiten: 389 - 402
    • Gossler C, Bierbrauer C, Moser R, Kunzer M, Holc K, Pletschen W, Köhler K, Wagner J, Schwärzle M, Ruther P, Paul O, Neef J, Keppeler D, Hoch G, Moser T, Schwarz U
      GaN-based micro-LED arrays on flexible substrates for optical cochlear implants
      2014 J Phys D Appl Phys, Band: 47, Ergänzungsband: 205401, Seiten: 1 - 6
    • Dombovari B, Fiath R, Kerekes B.P., Toth E, Wittner L, Horvath D, Seidl K, Herwik S, Torfs T, Paul O, Ruther P, Neves H, Ulbert I
      In vivo validation of the electronic depth control probes
      2014 Biomed Tech, Band: 59(4), Seiten: 283 - 289
    • Chow W.W.Y., Herwik S, Kisban S, Ruther P, Neves H, Oscarsson S, Göthelid E
      Influence of bio-coatings on the recording performance of neural electrodes
      2014 Biomed Tech, Band: 59(4), Seiten: 315 - 322
    • Stieglitz T, Neves H, Ruther P
      Neural probes - microsystems to interface with the brain
      2014 Biomed Tech, Band: 59(4), Seiten: 269 - 271
    • Donelly N.A., Holtzman T, Rich P.D., Nevado-Holgado A.J., Fernando A.B.P., Van Dijck G, Holzhammer T, Paul O, Ruther P, Ruther P, Paulsen O, Robbins T.W., Dalley J.W.
      Oscillatory activity in the medial prefrontal cortex and nucleus accumbens correlates with impulsivity and reward outcome
      2014 Plos One, Band: 9, Nummer: 10, Ergänzungsband: e111300

    2013

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    • Le Huy V, Kamiya S, Nagayoshi K, Izumi H, Gaspar J, Paul O
      A prediction scheme of the static fracture strength of MEMS structures based on the characterization of damage distribution on a processed surface
      2013 J Micromech Microeng, Band: 23, Ergänzungsband: 045008, Seiten: 1 - 10
    • Kuhl M, Gieschke P, Rossbach D, Hilzensauer S, Panchaphongsaphak T, Ruther P, Lapatki B, Paul O, Manoli Y
      A wireless stress mapping system for orthodontic brackets using CMOS integrated sensors
      2013 Ieee J Solid-st Circ, Band: 48, Nummer: 9, Seiten: 2191 - 2202
    • Calixto R, Salamat B, Rode T, Hartmann T, Volckaerts B, Ruther P, Lenarz T, Lim H
      Investigation of a new electrode array technoogy for a central auditory prosthesis
      2013 Plos One, Band: 8, Nummer: 12, Ergänzungsband: e82148
    • Huber S, Schott C, Paul O
      Package stress monitor to compensate for the piezo-hall effect in CMOS hall sensors
      2013 Ieee Sens J, Band: 13, Nummer: 8, Ergänzungsband: 2013, Seiten: 2890 - 2898
    • Lemke B, Baumann M, Gieschke P, Baskaran R, Paul O
      Piezoresistive CMOS-compatible sensor for out-of-plane shear stress
      2013 Sensor Actuat A-phys, Band: 189, Seiten: 488 - 495

    2012

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    • Kaufmann T, Vecchi M C, Ruther P, Paul O
      A computationally efficient numerical model of the offset of CMOS-integrated vertical Hall devices
      2012 Sensor Actuat A-phys, Band: 178, Seiten: 1 - 9
    • Paul O, Raz R, Kaufmann T
      Analysis of the offset of semiconductor vertical Hall devices
      2012 Sensor Actuat A-phys, Band: 174, Seiten: 24 - 32
    • Chow W W Y, Herwik S, Ruther P, Goethelid E, Oscarsson S
      Bio-polymer coatings on neural probe surfaces: Influence of the initial sample composition
      2012 Appl Surf Sci, Band: 258, Seiten: 7864 - 7871
    • Seidl K, Schwärzle M, Ulbert I, Neves H P, Paul O, Ruther P
      CMOS-based high-density silicon microprobe arrays for electronic depth control in intracortical neural recording–characterization and application
      2012 J Microelectromech S, Band: 21, Nummer: 6, Seiten: 1426 - 1435
    • van Dijck G, Seidl K, Paul O, Ruther P, van Hulle M, Reinoud M
      Enhancing the Yield of High-Density Electrode Arrays Through Automated electrode Selection
      2012 Int J Neural Syst, Band: 22, Nummer: 1, Seiten: 1 - 19
    • Gaspar J, Gualdino A, Lemke B, Paul O, Chu V, Conde J P
      Mechanical and piezoresistive properties of thin silicon films deposited by plasma-enhanced chemical vapor deposition and hot-wire chemical vapor deposition at low substrate temperatures
      2012 J Appl Phys, Band: 112, Ergänzungsband: 024906, Seiten: 1 - 8
    • Alan T, Yokosawa T, Gaspar J, Pandraud G, Paul O, Creemer F, Sarro P M, Zandbergen H W
      Micro-fabricated channel with ultra-thin yet ultra-strong windows enables electron microscopy under 4-bar pressure
      2012 Appl Phys Lett, Band: 100, Ergänzungsband: 081903, Seiten: 1 - 4
    • Lemke B, Baskaran R, Paul O
      Piezoresistive CMOS sensor for out-of-plane normal stress
      2012 Sensor Actuat A-phys, Band: 176, Seiten: 10 - 18
    • Le Huy V, Kamiya S, Gaspar J, Paul O
      Statistical Characterization of Fracture Strength and Fatigue Lifetime of Polysilicon Thin Films with Different Stress Concentration Fields
      2012 Journal of Solid Mechanics and Materials Engineering, Band: 6, Nummer: 11, Seiten: 1013 - 1029
    • Le Huy V, Gaspar J, Paul O, Kamiya S
      Statistical characterization of fatigue lifetime of polysilicon thin films
      2012 Sensor Actuat A-phys, Band: 179, Seiten: 251 - 262
    • Martin T, Gengenbach U, Guth H, Ruther P, Paul O, Bretthauer G
      silicon linkage with novel compliant mechanism for piezoelectric actuation of an intraocular implant
      2012 Sensor Actuat A-phys, Nummer: 188, Seiten: 335 - 341

    2011

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    • Stephan J, Pagounis E, Laufenberg M, Paul O, Ruther P
      A Novel Concept for Strain Sensing Based on the Ferromagnetic Shape Memory Alloy NiMnGa
      2011 Ieee Sens J, Band: 11, Nummer: 11, Seiten: 2683 - 2689
    • D. Fan, D. Rich, T. Holtzman, P. Ruther, J.W. Dalley, A. Lopez, M.A. Rossi, J.W. Barter, D. Salas-Meza, S. Herwik, T. Holzhammer, J. Morizio, H.H. Yin
      A Wireless Multi-Channel Recording System for Freely Behaving Mice and Rats
      2011 Plos One, Band: 6, Nummer: 7, Ergänzungsband: e22033, Seiten: 1 - 9
    • S. Spieth, O. Brett, K. Seidl, A.A.A. Aarts, M.A. Erismis, S. Herwik, F. Trenkle, S. Tätzner, J. Auber, M. Daub, H.P. Neves, R. Puers, O. Paul, P. Ruther, R. Zengerle
      A floating 3D silicon microprobe array for neural drug delivery compatible with electrical recording
      2011 J Micromech Microeng, Band: 21, Seiten: 125001 - 125017
    • S. Rues, B. Panchaphongsaphak, P. Gieschke, O. Paul, B.G. Lapatki
      An analysis of the measurement principle of smart brackets for 3D force and moment monitoring in orthodontics
      2011 J Biomech, Band: 04, Nummer: 029
    • O. Frey, P.D. van der Wal, S. Spieth, O. Brett, K. Seidl, O. Paul, P. Ruther, R. Zengerle, N.F. de Rooij
      Biosensor microprobes with integrated microfluidic channels for bi-directional neurochemical interaction
      2011 J Neural Eng, Band: 8, Seiten: 66001 - 66010
    • K. Seidl, S. Herwik, T. Torfs, H.P. Neves, O. Paul, P. Ruther
      CMOS-based high-density silicon micro probe arrays for electronic depth control in intracortical neural recording
      2011 J Microelectromech S, Band: 20, Nummer: 6, Seiten: 1439 - 1448
    • R.P. von Metzen, N. Lass, P. Ruther, T. Stieglitz
      Diffusion-Limited Deposition of Parylene C
      2011 J Microelectromech S (Journal of Microelectromechanical Systems 2011, Band: 20, Nummer: 1, Seiten: 239 - 250
    • B. Lemke, R. Baskaran, S. Ganapathysubramanian, O. Paul
      Experimental Determination of Stress Distributions Under Electroless Nickel Bumps and Correlation to Numerical Models
      2011 Ieee Sens J, Band: 11, Nummer: 11, Seiten: 2711 - 2717
    • Friedmann A, Cismak A, Tautorat C, Koester P J, Baumann W, Held J, Gaspar J, Ruther P, Paul O, Heilmann A
      FIB preparation and SEM investigations for three-dimensional analysis of cell cultures on microneedle arrays
      2011 Scanning, Band: 33, Seiten: 1 - 9
    • G.C. Pedrini, J. Gaspar, M.E. Schmidt, I. Alekssenko, O. Paul, W. Osten
      Measurement of nano/micro out-of-plane and in-plane displacements of micromechanical components by using digital holography and speckle interferometry
      2011 Opt Eng, Band: 50, Nummer: 10, Seite: 101504
    • A. Menzel, K. Subannajui, F. Güder, D. Moser, O. Paul, M. Zacharias
      Multifunctional ZnO-Nanowire-Based Sensor
      2011 Adv Funct Mater, Band: 20, Seiten: 1 - 7
    • Kaufmann T, Kopp D, Purkl F, Baumann M, Ruther P, Paul O
      Piezoresistive Response of Vertical Hall Devices
      2011 Ieee Sens J, Band: 11, Nummer: 11, Seiten: 2628 - 2635
    • Sbierski B, Gieschke P, Paul O
      Shear Piezoresistance in MOSFET Devices Under General Operating Conditions
      2011 Ieee T Electron Dev, Band: 58, Nummer: 12, Seiten: 4145 - 4154
    • P. Alpuim, J. Gaspar, P. Gieschke, C. Ehling, J. Kistner, N.J. Goncalves, M.I. Vasilevskiy, O. Paul
      Study of the piezoresistivity of doped nanocrystalline silicon thin films
      2011 J Appl Phys, Band: 109, Seiten: 123717-1 - 123717-9
    • M. Herrmann, P. Gieschke, P. Ruther, O. Paul
      Torsional bridge setup for the characterization of integrated circuits and micro sensors under mechanical shear stress
      2011 Rev Sci Instrum, Band: 82, Seite: 125002
    • Torfs T, Aarts A, Erismis M, Aslam J, Yazicioglu R, Seidl K, Herwik S, Ulbert I, Dombovari B, Fiath R, Kerekes B, Puers R, Paul O, Ruther P, Van Hoof C, Neves H
      Two-Dimensional Multi-Channel Neural Probes with Electronic Depth Control
      2011 BioCAS, Band: 5, Seiten: 403 - 412
    • S. Herwik, O. Paul, P. Ruther
      Ultrathin Silicon Chips of Arbitrary Shape by Etching Before Grinding
      2011 J Microelectromech S, Band: 20, Nummer: 4, Seiten: 791 - 793

    2010

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    • C. Hassler, R. von Metzen, P. Ruther, T. Stieglitz
      Characterization of Parylene C as an Encapsulation Material for Implanted Neural Prostheses
      2010 Wiley InterScience, Seiten: 266 - 274
    • K. Seidl, T. Torfs, P.A. de Maizière, G. van Dijck, R. Csercsa, B. Dombovari, Y. Nurcahyo, H. Ramirez, M.M. van Hulle, G.A. Orban, O. Paul, I. Ulbert, H. Neves, P. Ruther
      Control and data acuqisition software for high-density CMOS-based microprobe arrays implementing electronic depth control
      2010 Biomed Tech, Seiten: 183 - 191
    • J. Held, J. Gaspar, P. Ruther, M. Hagner, A. Cismak, A. Heilmann, O. Paul
      Design of experiment characterization of microneedle fabrication processes based on dry silicon etching
      2010 J. Micromech Microeng 2010, Seiten: 1 - 11
    • M. Cornils, A. Rottmann, O. Paul
      How to Extract the Sheet Resistance and Hall Mobility from Arbitrarily Shaped Planar Four-Terminal Devices with Extended Contacts
      2010 Ieee T Electron Dev, Seiten: 2087 - 2097
    • K. Seidl, S. Spieth, S. Herwik, J. Steigert, R. Zengerle, O. Paul. P. Ruther
      In-Plane silicon probes for simultaneous neural recording and drug delivery
      2010 J. Micromech Microeng 2010, no. 105006, Seiten: 1 - 11
    • U. Bartsch, J. Gaspar, O. Paul
      Low-frequency two-dimensional resonators for vibrational micro energy harvesting
      2010 J Micromech Microeng, Seiten: 1 - 12
    • S. Brugger, O. Paul
      Magnetic field amplification by slender cuboid-shaped magnetic concentrators with a single gap
      2010 Sensor Actuat A-phys, Seiten: 135 - 139
    • J. Gaspar, O. Paul, V. Chu, J.P. Conde
      Mechanical properties of thin silicon films deposited at low temperatures by PECVD
      2010 J Micromech Microeng, Seiten: 1 - 6
    • P. Ruther, S. Herwik, S. Kisban, K. Seidl, O. Paul
      Recent Progress in Neural Probes Using Silicon MEMS Technology
      2010 Ieej T Electr Electr, Band: 5, Seiten: 505 - 515
    • L. Grand, L. Wittner, S. Herwik. E. Göthelid, P. Ruther, S. Oscarsson, H. Neves, B. Dombovári, R. Csercsa, G. Karmos, I. Ulbert
      Short and Long Term Biocompatibility of NeuroProbes Silicon Probes
      2010 J. Neurosci Meth, Nummer: 189, Seiten: 216 - 229

    2009

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    • T. Stieglitz, B. Rubehn, C. Henle, S. Kisban, S. Herwik, P. Ruther, M. Schuettler
      Brain-computer interfaces: an overview of the hardware to record neural signals from the cortex
      2009 Prog Brain Res, Band: 175, Seiten: 297 - 315
    • G. Pedrini, J. Gaspar, T. Wu, W. Osten, O. Paul
      Calibration of optical systems for the measurement of microcomponents
      2009 Opt Laser Eng, Seiten: 203 - 210
    • G. Pedrini, J. Gaspar, W. Osten, O. Paul
      Development of Reference Standards for the Calibration of Optical Systems Used in the Measurement of Microcomponents
      2009 The Author
    • O. Paul, M. Cornils
      Explicit connection between sample geometry and Hall response
      2009 Appl Phys Lett, Band: 95, Seite: 1-3
    • S. Herwik, S. Kisban, A.A.A. Aarts, K. Seidl, G. Girardeau, K. Benchenane, M.B. Zugaro, S.I. Wiener, O. Paul, H.P. Neves, P. Ruther
      Fabrication technology for silicon-based microprobe arrays used in acute and sub-chronic neural recording
      2009 J Micromech Microeng, Band: 19, Seite: 074008
    • J. Kern, S. Loeckermann, A. Fritsch, I. Hausser, W. Roth, T. Magin, C. Mack, M. Müller, O. Paul, P. Ruther, L. Bruckner-Tuderman
      Mechanisms of fibroblast cell therapy for dystrophic epidermolysis bullosa: High stability of collagen VII favors logn-term skin integrity
      2009 The American Society of Gene & Cell Therapy / Molecular Therapy
    • J. Gaspar, M. Schmidt, J. Held, O. Paul
      Wafer-Scale Microtensile Testing of Thin Films
      2009 J Microelectromech S, Band: 18, Nummer: 5, Seiten: 1062 - 1076

    2008

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    • J. Yang, J. Gaspar, O. Paul
      Fracture Properties of LPCVD Silicon Nitride and Thermally Grown Silicon Oxide Thin Films From the Load-Deflection of Long Si3N4 ans SiO/Si3N4 Diaphragms
      2008 J Microelectromech S, Band: 17, Seiten: 1120 - 1134
    • P. Ruther, M. Wandt
      Innovativer miniaturisierter 3D-Kraftsensor für Koordinatenmesssysteme von Mikrokomponenten
      2008 Sensor Magazin, Seiten: 30 - 33
    • O. Paul, P. Ruther
      Microneedle Electrodes for Measuring Potentials in Biology and Medicine
      2008 mst news, Nummer: 6, Seiten: 12 - 12
    • M. Cornils, O. Paul
      Reverse-magnetic-field reciprocity in conductive samples with extended contacts
      2008 J Appl Phys, Band: 104, Nummer: 0245, Seiten: 1 - 7
    • S. Kamiya, S. Amaki, T. Kawai, N. Honda, P. Ruther, J. Gaspar, O. Paul
      Seamless interpretation of the strength and fatigue lifetime of polycrystalline silicon thin films
      2008 J Micromech Microeng, Band: 18, Nummer: 9502, Seiten: 1 - 10
    • M. Cornils, O. Paul
      Sheet resistance determination of electrically symmetric planar four-terminal devices with extended contacts
      2008 J Appl Phys, Band: 104, Ergänzungsband: 024503, Seiten: 1 - 10

    2007

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    • Kamiya S, Kuypers, Trautmann A, Ruther P, Paul O
      Process Temperature Dependent Mechanical Properties of Polysilicon Measured Using a Novel Tensile Test Structure
      2007 J Microelectromech S
    • M. Cornils, M. Dölle, O. Paul
      Sheet Resistance Determination Using Symmetric Structures With Contacts of Finite Size
      2007 Ieee T Electron Dev, Band: 54, Nummer: 10, Seiten: 2756 - 2761
    • M. Dölle, J. Held, P. Ruther, O. Paul
      Simultaneous and Independent Measurement of Stress and Temperature Using a Single Field-Effect Transistor Structure
      2007 J Microelectromech S (Journal of Microelectromechanical Systems) 2007, Band: 15, Nummer: 5, Seiten: 1232 - 1242
    • Lapatki BG, Bartholomeyczik J, Ruther P, Jonas IE, Paul O
      Smart Bracket for Multi-Dimensional Force and Moment Measurement.
      2007 J Dent Res, Band: 86, Nummer: 1, Seiten: 73 - 78
    • B. Lapatki, O. Paul
      Smart Brackets for 3D-Force-Moment Measurements in Orthodontic Research and Therapy-Developmental Status and Prospects
      2007 J Orofac Orthop, Seiten: 377 - 396

    2006

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    • Doelle M, Mager D, Ruther P, Paul O
      Geometry optimization for planar piezoresistive stress sensors based on the pseudo-Hall effect
      2006 Sensor Actuat A-phys, Band: 127, Seiten: 261 - 269
    • Doelle M, Peters C, Ruther P, Paul O
      Piezo-FET stress sensor array for wire bonding characterization
      2006 J Microelectromech S, Band: 15, Nummer: 1, Seiten: 120 - 130
    • Bartholomeyczik J, Doelle M, Ruther P, Paul O
      The continuous spinning current (CSC) stress sensor method for the extraction of two stress components in an offset compensated manner
      2006 Sensor Actuat A-phys, Band: 127, Seiten: 255 - 260

    2005

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    • Jeyaprakash JD, Samuel S, Ruther P, Frerichs HP, Lehmann M, Paul O, RYhe J
      A Simple Route towards the Reduction of Surface Conductivity in Gas Sensor Devices
      2005 Sensor Actuat B-chem, Band: 110, Seiten: 218 - 224
    • Schuster M, Klein N, Ruther P, Trautmann A, Paul O, Kuzel P, Kadlec F
      An interconnected 2D-TM EBG structure for millimeter and submillimeter waves
      2005 Ieee J Sel Area Comm, Band: 23, Nummer: 7, Seiten: 1378 - 1384
    • J. Yang, O. Paul
      Fracture Properties of Thermal Silicon Oxide Thin Films From the Load-Deflection of Long SiNx/SiO2 Membranes
      2005 J Microelectromech S (Journal of Microelectromechanical Systems) 2005
    • L. Samid, C. Peters, P. Ruther, O. Paul, Y. Manoli
      Low-Power Sensor Read-Out Circuits With Continuous Time Sigma-Delta Modulators
      2005 Analog 2005, Seiten: 151 - 155
    • Ruther P, Bartholomeyczik J, Buhmann A, Trautmann A, Steffen K, Paul O
      Microelectromechanical HF resonators fabricated using a novel SOI-based low temperature process
      2005 Ieee Sens J, Band: 5, Nummer: 5, Seiten: 1112 - 1119
    • J. Bartholomeyczik, S. Brugger, P. Ruther, O. Paul
      Multidimensional CMOS In-Plane Stress Sensor
      2005 IEEE Sens J (IEEE Sensors Journal) 2005, Band: 5, Nummer: 5, Seiten: 872 - 882
    • Bartholomeyczik J, Ruther P, Paul O
      Multidimensional CMOS in-plane stress sensor
      2005 Ieee Sens J, Band: 5, Nummer: 5, Seiten: 872 - 882
    • M. Dölle, C. Peters, P. Ruther, O. Paul
      Piezo-FET Stress Sensor Array for Wire Bonding Characterization
      2005 Microelectromech. Syst. (IEEE) 2005

    2004

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    • O. Paul
      Dünnschicht-Materialdaten für die Mikrotechnik
      2004 VDI-Berichte, Band: 1829, Seiten: 423 - 432

    2003

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    • P. Ruther, R. Janke, U. Schiller, O. Paul
      Thermomagnetic Residual Offset in Integrated Hall Plates
      2003 IEEE Sens J (IEEE Sensors Journal) 2003, Band: 3, Nummer: 6, Seiten: 693 - 699
    • Ruther P, Buesser W, Janke R, Schiller U, Paul O
      Thermomagnetic residual offset in integrated Hall plates
      2003 Ieee Sens J, Band: 3, Nummer: 6, Seiten: 693 - 699

    2002

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    • J. Yang, C. Peters, O. Paul
      Fracture Properties of LPCVD Silicon Nitride Thin Films From the Load-Deflection of Long Membranes
      2002 Sensor Acutat A-phys (Sensors and Actuators A-physical) 2002, Band: 97, Nummer: 98, Seiten: 520 - 526
    • Yang Jinling, Peters C, Paul O
      Fracture Properties of LPCVD Silicon Nitride Thin Films from the Load-Deflection of Long Membranes
      2002 Sensor Actuat A-phys, Band: 97-98, Seiten: 520 - 526
    • T. Kramer, O. Paul
      Postbuckled Micromachined Square Membranes Under Differential Pressure
      2002 J Micromech Microeng (Journal of Micromechanics and Microengineering) 2002, Band: 12, Seiten: 475 - 478
    • Kramer T, Paul O
      Postbuckled Micromachined Square Membranes under Differential Pressure
      2002 J Micromech Microeng, Band: 12, Seiten: 475 - 478
    • S. Hafizovic, O. Paul
      Temperature Dependent Thermal Conductivities of CMOS Layers by Micromachined Thermal van der Pauw Test Structures
      2002 Sensor Actuat A-phys (Sensors and Actuators A-physical) 2002, Band: 97, Nummer: 98, Seiten: 246 - 252
    • Hafizovic S, Paul O
      Temperature Dependent Thermal Conductivities of CMOS Layers by Micromachined Thermal van der Pauw Test Structures
      2002 Sensor Actuat A-phys, Band: 97-98, Seiten: 246 - 252

    2001

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    • Wagner U, Franz J, Schweiker M, Bernhard W, Müller-Fiedler R, Michel B, Paul O
      Mechanical Reliability of MEMS-Structures under Shock Load
      2001 Microelectron Reliab, Band: 41, Seiten: 1657 - 1662
    • H. Nakajima, P. Ruther, J. Mohr, M. Tsugai, T. Usami
      Micro-Optical Distance Sensor Fabricated by Deep X-Ray Lithography
      2001 Opt Eng, Band: 40, Nummer: 8, Seiten: 1667 - 1673
    • M. Ehmann, P. Ruther, M. von Arx, O. Paul
      Operation and Short-Term Drift of Polysilicon-Heated Microstructures at Temperatures up to 1200 K
      2001 J Micromech Microeng (Journal of Micromechanics and Microengineering) 2001, Band: 11, Seiten: 397 - 401
    • Ehmann M, Ruther P, von Arx M, Paul O
      Operation and Short-Term Drift of Polysilicon-Heated Microstructures at Temperatures up to 1200 K
      2001 J Micromech Microeng, Band: 11, Seiten: 397 - 401
    • T. Kramer, O. Paul
      Postbuckled Micromachined Square Thin Film Membranes under Differential Pressure
      2001 Materials Research Society, Band: 695, Seiten: 79 - 84
    • T. Kramer, O. Paul
      Surface Micromachined Ring Test Structures to Determine Mechanical Properties of Compressive CMOS IC Thin Films
      2001 Sensor Actuat A-phys (Sensors and Actuators A-physical) 2001, Band: 92, Seiten: 292 - 298
    • Kramer T, Paul O
      Surface Micromachined Ring Test Structures to Determine Mechanical Properties of Compressive CMOS IC Thin Films
      2001 Sensor Actuat A-phys, Band: 92, Seiten: 292 - 298
    • A. Schaufelbühl, N. Schneeberger, U. Münch, M. Wälti, O. Paul, O. Brand, H. Baltes, C. Menolfi, Q. Huang, E. Döring, M. Läpfe
      Uncooled Low-Cost Thermal Imager Based on micromachined CMOS Integrated Sensor Array
      2001 J Microelectromech S, Band: 10, Seiten: 503 - 510
    • Schaufelbuehl A, Schneeberger N, Münch U, Waelti M, Paul O, Brand O, Baltes H, Menolfi C, Huang Q, Doering E, Loepfe M
      Uncooled low-cost thermal imager based on micromachined CMOS integrated sensor array
      2001 IEEE/ASME J. Microelectromech. Syst., Band: 10, Seiten: 503 - 510

    2000

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    • O. Paul, P. Ruther, L. Plattner, H. Baltes
      A Thermal von der Pauw Test Structure
      2000 Ieee T Semiconduct M, Band: 13, Nummer: 2, Seiten: 159 - 166
    • M. von Arx, O. Paul, H. Baltes
      Process Dependent Thin Film Thermal Conductivity for Thermal CMOS MEMS
      2000 J Microelectromech S, Band: 9, Nummer: 1, Seiten: 136 - 145

    1999

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    • D. Westberg, O. Paul, G.I. Andersson, H. Baltes
      A CMOS-Compatible Device for Fluid Density Measurements Fabricated by Sacrificial Aluminum Etching
      1999 Sensor Actuat A-phys, Band: 73, Seiten: 243 - 251
    • O. Paul, H. Baltes
      Mechanical Behavior and Sound Generation Efficiency of Prestressed, Elastically Clamped and Thermomechanically Driven Thin Film Sandwiches
      1999 J Micromech Microeng, Band: 9, Seiten: 19 - 29
    • P. Ruther, H. Nakajima, J. Mohr, St. Saenger
      Miniaturisierter Abstandssensor, hergestellt nach dem LIGA-Verfahren
      1999 Technisches Messen, Band: 66, Nummer: 5, Seiten: 176 - 184
    • V. Ziebart, O. Paul, H. Baltes
      Strongly Buckled Square Micromachined Membranes
      1999 J Microelectromech S, Band: 8, Nummer: 4, Seiten: 423 - 432

    1998

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    • M. Emmenegger, J. Korvink, M. Bächtold, M. von Arx, O. Paul, H. Baltes
      Application of Harmonic Finite Element Analysis to a CMOS Heat-Capacity Measurement Structure
      1998 Sensor Mater, Band: 10, Seiten: 405 - 412
    • V. Ziebart, O. Paul, U. Münch, J. Schwizer, O. Paul, H. Baltes
      Mechanical Properties of Thin Films from the Load-Deflection of Long Clamped Plates
      1998 J Microelectromech S, Band: 7, Seiten: 320 - 328

    Monographien

    Jahre: 2007 | 2005 | 2001
    Icon: top zurück zur Übersicht aller Publikationen

      2007

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      • Transactions on Electrical and Electronic Engineering, Seite: 17
        Adanced Silicon Microstructures, Sensors and Systems
        O. Paul, J. Gaspar, P. Ruther

      2005

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      • Wiley-VCH
        Mikrosystemtechnik für Ingenieure
        Menz W, Mohr J, Paul O

      2001

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      • Wiley-VCH
        Microsystem Technology
        Menz W, Mohr J, Paul O

      Buchbeiträge

      Jahre: 2007 | 2006 | 2005 | 2001
      Icon: top zurück zur Übersicht aller Publikationen

        2007

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        • O. Paul, J. Gaspar
          Thin-Film Characterization Using the Bulge Test
          In: Reliability of MEMS
          2007, Eds. Weinheim, Germany Wiley-VCH, Seiten: 67 - 121,

        2006

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        • Paul O
          Microtransducer Operation
          In: MEMS – A Practical Guide to Design, Analysis and Applications
          2006, William Andrew Publishing / Springer-Verlag, J. G. Korvink and O. Paul, Seiten: 1 - 51, J. G. Korvink and O. Paul,

        2005

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        • Paul O, Ruther P
          Material Characterization
          In: CMOS-based Micro and Nano Electro Mechanical Systems
          2005, Wiley-VCH, O. Brand and G. Fedder, Seiten: 69 - 135, O. Brand and G. Fedder,

        2001

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        • W. Menz, J. Mohr, O. Paul
          Microsystem Technology
          In: Microsystem Technology
          2001, Wiley-VCH, ISBN: 3-527-29634-4

        Vorträge

        Jahre: 2018 | 2017 | 2016 | 2015 | 2014
        Icon: top zurück zur Übersicht aller Publikationen

          2018

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          2017

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          2016

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          • Ruther P
            Let there be light - How MEMS directly enlightens the brain?
            2016 KIT Campus North, Karlsruhe
          • Schwärzle M, Ayub S, Barz F, Paul O, Ruther P
            LED and laser diode based MEMS tools for optogenetics
            2016 International Workshop for Advanced Neurotechnology (ICAN), University of Michigan, Ann Arbor, USA, 13.-14. June 2016
          • Ruther P
            MEMS-based technologies for optogenetic applications, Symposium on Restoration of sensory and motor function
            2016 Universitätsmedizin Göttingen, 26./27. May 2016
          • Ruther P
            How to illuminate brain tissue?
            2016 IGSN Workshop, University of Bochum
          • Ruther P
            Innovative tools for electrophysiology and optogenetics based on MEMS technologies
            2016 Medizinische Hochschule Hannover, 23.3.2016
          • Ruther P
            Trends in Silicon-based Neural Probe Arrays Used in Electrophysiology and Optogenetics
            2016 GDR 2904 Multielectrode Systems for Neuroscience: 6th Annual Meeting, 5-8 Jan 2016 Grenoble-Autrans (France)
          • Ruther P
            CMOS-based probe arrays for high-density neural recordings
            2016 Bernstein Sparks Workshop, Tutzing, 28./29. June 2016
          • Ruther P, Pothof F, Barz F, Bonini L, Orban GA, Stieglitz T, Paul O
            MEMS Technologies for High-Channel Count SEEG Probes
            2016 Insights from the inside Workshop, Intracranial studies of the human brain, 30.11.16-01.12.16, Tel-Aviv, Israel
          • Paul O, Ruther P
            MEMS Tools for Bidirectional Brain-Machine Interfaces
            2016 International Workshop for Advanced Neurotechnology (ICAN), University of Michigan, Ann Arbor, USA, 13.-14. June 2016
          • Gordillo C, Kuhner A, Schubert T, Burgard W, Bast H, Becker B, Bennewitz M, Galchev T, Keller M, Manoli Y, Maurer C, Paul O, Ruther P, Stachniss C
            Robotics meets neuroscience: Electode selection and motion analysis
            2016 International Workshop for Advanced Neurotechnology (ICAN), University of Michigan, Ann Arbor, USA, 13.-14. June 2016

          2015

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          2014

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          Konferenzbeiträge

          Jahre: 2019 | 2018 | 2017 | 2016 | 2015 | 2014 | 2013 | 2012 | 2011 | 2010 | 2009 | 2008 | 2007 | 2006 | 2005 | 2004 | 2003 | 2002 | 2001 | 2000 | 1999 | 1998
          Icon: top zurück zur Übersicht aller Publikationen

            2019

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            • Huber S, Lázár Z, Berger M, Paul O
              A CMOS Hall-based magnetic multisensor system free from parasitic effects of temperature and package stress
              2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII, Berlin/Germany , Seiten: 134 - 137
            • Berger M, Becker F, Paul O
              Guidelines for multisensor system calibration with and without regularization
              2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII, Berlin/Germany , Seiten: 2103 - 2106
            • Morikawa Y, Ayub S, Paul O, Kawano T, Ruther P
              Highly stretchable kirigami structure with integrated LED chips and electrodes for optogenetic experiments on perfused hearts
              2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII, Berlin/Germany , Seiten: 2484 - 2487
            • Klein E, Kaku Y, Paul O, Ruther P
              Flexible µLED-based optogenetic tool with integrated µ-lens array and conical concentrators providing light extraction improvements above 80%
              2019 IEEE MEMS 2019, Seoul, Korea , Seiten: 632 - 635
            • Sharma K, Dholipet Nagendra Kumar S, Paul O, Ruther P
              Microfluidic neural probes with buried channels fabricated using continuous flow XeF³ etching of silicon
              2019 IEEE MEMS 2019, Seoul, Korea , Seiten: 569 - 572

            2018

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            • Hoch K, Pothof F, Becker F, Paul O, Ruther P
              A Magnetic, Micro-spring-suspended System for the Safe Electrical Interconnection of Neural Implants
              2018 IEEE MEMS Conf. 2018, Belfast, Ireland , Seiten: 369 - 372
            • Diaz-Maue L, Schwaerzle M, Ruther P, Luther S, Richter C
              Follow the Light - From Low-Energy Defibrillation to Multi-Site Photostimulation
              2018 40th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC), Honolulu, HI, USA , Seiten: 4832 - 4835
            • Diaz-Maue L, Schwärzle M, Ruther P, Luther S, Richter C
              Follow the light - from low-energy defibrillation to multi-site photostimulation
              2018 EMBC 2018 Conference, Hawaii, USA
            • Ayub S, Ruther P, Paul O, Kohl P, Zgierski-Johnston CM
              Invasive Optical Pacing in Perfused, Optogenetically Modified Mouse Heart Using Stiff Multi-LED Optical Probes
              2018 40th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC), Honolulu, HI, USA , Seiten: 4836 - 4839
            • Otte E, Ayub S, Paul O, Ruther P
              LED-based Intracerebral Optrode for Simultaneous Optical Stimulation and Electrophysiological Recording
              2018 IEEE MEMS Conf. 2018, Belfast, Ireland , Seiten: 384 - 387

            2017

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            • Ayub S, Goßler C, Engesser F, Paul O, Ruther P
              Compact intracerebral probe with yellow phosphor-based light conversion for optogenetic control
              2017 IEEE Transducers 2017, Kaohsiung / Taiwan
            • Sayed Herbawi A, Kießner L, Paul O, Ruther P
              High-density CMOS neural probe implementing a hierarchical addressing scheme for 1600 recording sites and 32 output channels
              2017 IEEE Transducers 2017, Kaohsiung / Taiwan
            • Pothof F, Chauvière L, Holzhammer T, Aarts A, Paul O, Singer W, Ruther P
              Comparison of the in-vivo neural recording quality of floating and skull-fixed silicon probes
              2017 8th International IEEE EMBS Conference on Neural Engineering , Seiten: 158 - 161
            • Pothof F, Sharma K, Paul O, Ruther P
              High-channel-count impedance spectroscopy logger
              2017 8th International IEEE EMBS Conference on Neural Engineering , Seiten: 211 - 214
            • Schwärzle M, Ringwald P, Paul O, Ruther P
              First dual-color optrode with bare laser diode chips directly butt-coupled to hybrid-polymer waveguides
              2017 IEEE MEMS 2017, Las Vegas, NV, USA
            • Klein E, Goßler C, Paul O, Schwarz U T, Ruther P
              High-yield indium-based wafer bonding for large-area multi-pixel optoelectronic probes for neuroscience
              2017 IEEE MEMS 2017, Las Vegas, NV, USA
            • Gullo M, Takeuchi S, Paul O
              Muscle-actuated biomimetic hydrogel-based 3D microskeleton
              2017 IEEE MEMS 2017, Las Vegas, NV, USA , Seiten: 101 - 104
            • Hafner J, Paul O, Kuhl M, Hehn T, Rossbach D
              Fabrication of Planar Copper Microcoils for Telemetric Orthodontic Applications
              2017 Eurosensors 2017, 03.-06.09.2017, Paris/France,
            • Klein E, Gossler C, Paul O, Ruther P
              High-density µLED-based Optical Cochlear Implant with Improved Thermo-mechanical Behavior
              2017 OPTOGEN 2016, 3rd Int. Workshop on Technologies for Optogenetics, Freiburg/Germany, 05.-06.12.2016 Book of Abstracts, Seiten: 27 - 27
            • Klein E, Ayub S, Gossler C, Paul O, Ruther P
              High-density μLED probes on flexible and stiff substrates
              2017 SfN 2017, 11.-15.11.2017, Washington DC/USA
            • Ayub S, Otte E, Paul O, Ruther P
              Intracerebral optrodes with integrated LED chips and recording electrodes for optogenetic experiments
              2017 OPTOGEN 2016, 3rd Int. Workshop on Technologies for Optogenetics, Freiburg/Germany, 05.-06.12.2016 Book of Abstracts, Seiten: 16 - 16
            • Schwärzle M, Ayub S, Paul O, Ruther P
              Optical tools with integrated light sources for optogenetics - An analysis of different system approaches
              2017 Society for Neuroscience - Neuroscience 2017, Washington, DC / USA
            • Schwärzle M, Ringwald P, Paul O, Ruther P
              Zweifarbige Optrode basierend auf ungehäusten Laserdioden und hybridpolymeren Wellenreitern für optogenetische Anwendungen
              2017 MikroSystemTechnik Kongress 2017, München, 23.-25.10.2017 , Seiten: 816 - 819

            2016

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            • Schröder T, Constantinescu V.S., Schwärzle M, Ayub S, Ruther P, Battaglia F.P.
              Modulation of downstream targets by spatio-temporal pattern stimulation of primary somatosensory cortex
              2016 Society for Neuroscience, San Diego/USA
            • Sayed Herbawi A, Velarde F, Paul O, Galchev T
              Self-powered CMOS active rectifier suitable for low-voltage mechanical energy harvesters
              2016 IEEE Sensors 2016, Orlando, USA
            • Gordillo C, Frank B, Ulbert I, Paul O, Ruther P, Burgard W
              Automatic Channel Selection in Neural Microprobes: A Combinatorial Multi-Armed Bandit Approach
              2016 IROS 2016, Daejeon, Korea
            • Pothof F, Sharma K, Paul O, Ruther P
              Cost-effective, high-channel-count system for impedance spectroscopy
              2016 BMT 2016, Basel, Schweiz , Seite: 241
            • Stieglitz T, Fiedler E, Vasjari D, Benlter C, Liljemalm R, Pothof F, Sayed Herbawi A, Barz F, Kuhl M, Paul O, Ruther P
              Developments for the next generation of brain probes
              2016 BMT 2016, Basel, Schweiz , Seite: 237
            • Ayub S, Barz F, Paul O, Ruther P
              Heterogeneous 3D optrode with variable spatial resolution for optogenetic stimulation and electrophysiological recording
              2016 38th Annual International Conference of the IEEE Engineering in Medicine and Biology Society
            • Heizmann S, Holzhammer T, Kilias A, Egert U, Ruther P, Asplund M
              Dye delivery from PEDOT electrodes in vivo - a new way to reconstruct recording sites
              2016 10th International Meeting on Substrate Integrated Microelectrode Arrays, Reutlingen, Germany
            • Boehler C, Kleber C, Heizmann S, Ruther P, Hofmann U, Egert U, Ruehe J, Stieglitz T, Asplund M
              Nanostructured and biofunctionalized coatings for microscale electrodes: bringing cutting edge materials science to microsystems engineered implants
              2016 10th World Biomaterials Congress, Montréal, Canada
            • Schwärzle M, Nehlich J, Schwarz U T, Paul O, Ruther P
              Hybrid polymer waveguide characterization for microoptical tools with integrated laser diode chips for optogenetic applications at 430 nm and 650 nm
              2016 SPIE Photonics West, San Fransciso/USA
            • Ayub S, Goßler C, Schwärzle M, Klein E, Paul O, Schwarz U T, Ruther P
              High-density probe with integrated thin-film micro light emitting diodes
              2016 IEEE MEMS Conf. 2016, Shanghai, China
            • Schwärzle M, Nehlich J, Ayub S, Paul O, Ruther P
              LED-based optical chchlear implant on highly flexible triple layer polyimide substrates
              2016 IEEE MEMS Conf. 2016, Shanghai, China
            • Gullo M, Takeuchi S, Paul O
              Muscle-actuated bio-hybrid MEMS by cell culture and differentiation on metamaterial micro-scaffolds
              2016 IEEE MEMS Conf. 2016, Shanghai, China
            • Barz F, Lausecker R, Wallrabe U, Ruther P, Paul O
              Wafer-level shellac-based interconnection process for ultrathin silicon chips of arbitrary shape
              2016 IEEE MEMS Conf. 2016, Shanghai, China
            • Fiáth R, Ayub S, Paul O, Ruther P, Ulbert I
              In vivo validation of compact LED probes with apertures
              2016 OPTOGEN 2016, 3rd Int. Workshop on Technologies for Optogenetics, Freiburg/Germany, 05.-06.12.2016 Book of Abstracts, Seiten: 34 - 34
            • Ayub S, Engesser F, Paul O, Ruther P
              Intracerebral optical probes with light confinement for optogenetic experiments
              2016 OPTOGEN 2016, 3rd Int. Workshop on Technologies for Optogenetics, Freiburg/Germany, 05.-06.12.2016 Book of Abstracts, Seiten: 33 - 33
            • Gossler C, Ayub S, Klein E, Schwärzle M, Paul O, Ruther P
              Optical probes with integrated thin-film µLEDs on flexible and rigid substrates
              2016 OPTOGEN 2016, 3rd Int. Workshop on Technologies for Optogenetics, Freiburg/Germany, 05.-06.12.2016 Book of Abstracts, Seiten: 12 - 12
            • Constantinescu V, Schröder T, Schwaerzle M, Ayub S, Ruther P, Battaglia F
              Optogenetic stimulation of spatial-temporal activity patterns in cortex by epidural LED grids and downstream effects on higher-order cortical areas
              2016 OPTOGEN 2016, 3rd Int. Workshop on Technologies for Optogenetics, Freiburg/Germany, 05.-06.12.2016 Book of Abstracts, Seiten: 36 - 36
            • Raz R, Schwärzle M, Paul O, Ruther P
              Polymer Based Thin-film Packaging of an Optical Cochlear Implant
              2016 OPTOGEN 2016, 3rd Int. Workshop on Technologies for Optogenetics, Freiburg/Germany, 05.-06.12.2016 Book of Abstracts, Seiten: 24 - 24

            2015

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            • Becker F, Kuhl M, Manoli Y, Paul O
              Novel method to operate Piezo-FET-based stress sensor offers tenfold increase in sensitivity
              2015 IEEE Sensors Conference 2015, Busan, South Korea
            • Schwärzle M, Elmlinger P, Paul O, Ruther P
              Miniaturisiertes 3×3 LED-Array mit integrierten Glasfasern und hochflexiblem Flachbandkabel für Anwendungen in der Optogenetik
              2015 MST-Kongress 2015, Karlsruhe, Germany , Seiten: 294 - 297
            • Becker F, Kuhl M, Manoli Y, Paul O
              Neuartiger Smart Tooth mit zehnfach höherer Kraftauflösung
              2015 MST-Kongress 2015, Karlsruhe, Germany
            • Pothof F, Bonini L, Lanzilotto M, Livi A, Fogassi L, Orban G.A., Paul O, Ruther P
              In-vivo validation of a cylindrical 64-channel depth probe with a diameter of 800 µm
              2015 Society for Neuroscience 2015, Chicago, Illinois, United States
            • Schwärzle M, Pothof F, Elmlinger P, Paul O, Ruther P
              LED-based neural probes for optogenetics
              2015 Annual Meeting of the Society of Neuroscience, Chicago, USA
            • Pothof F, Galchev T, Patel M, Sayed Herbawi A, Paul O, Ruther P
              Heterogeneous integration of analog CMOS chips on flexible substrates for high-resolution deep brain epilepsy diagnosis
              2015 Eurosensors 2015, Freiburg, Germany
            • Pothof F, Galchev T, Patel M, Sayed Herbawi A, Paul O, Ruther P
              128-channel deep brain recording probe with heterogenously integrated analog CMOS readout for focal epilepsy localization
              2015 Transducers 2015, Anchorage, Alaska, USA
            • Huber S, Raman J, van der Wiel A, Schott C, Rombouts P, Paul O
              A combined hall and stress sensor for highly accurate magnetic field sensing free from the piezo-hall effect
              2015 Transducers 2015, Anchorage, Alaska, USA
            • Sayed Herbawi A, Larramendy F, Galchev T, Holzhammer T, Mildenberger B, Paul O, Ruther P
              CMOS-based neural probe with enhanced electronic depth control
              2015 Transducers 2015, Anchorage, Alaska, USA
            • Goda K, Yoshioka T, Ao K, Abe R, Paul O
              Charge transport in SiO2/Si3N4 and SiO2/Si-rich SiN electrets for high-temperature electrostatic energy micro-harvesters
              2015 Transducers 2015, Anchorage, Alaska, USA
            • Moser D, Müller D, Paul O
              Compact multifunctional test structure to measure the in-plane thermoelectric figure of merit ZT of thin films
              2015 Transducers 2015, Anchorage, Alaska, USA
            • Schwärzle M, Pothof F, Paul O, Ruther P
              High-resolution neural depth probe with integrated 460 nm light emitting diode for optogenetic applications
              2015 Transducers 2015, Anchorage, Alaska, USA
            • Sander C, Leube C, Paul O
              Novel compact two-dimensional CMOS vertical hall sensor
              2015 Transducers 2015, Anchorage, Alaska, USA
            • Becker F, Kuhl M, Manoli Y, Paul O
              Novel instrumented tooth with tenfold increase in force resolution
              2015 Transducers 2015, Anchorage, Alaska, USA
            • Larramendy F, Yoshida S, Fekete Z, Serien D, Takeuchi S, Paul O
              Stackable octahedron-based photoresist scaffold by direct laser writing for controlled three-dimensional cell networks
              2015 Transducers 2015, Anchorage, Alaska, USA
            • Heizmann S, Kilias A, Okujeni S, Boehler C, Ruther P, Egert U, Asplund M
              Accurate neuronal tracing of microelectrodes based on PEDOT-dye coatings
              2015 7th Annual International IEEE EMBS Conference on Neural Engineering, Montpellier, France
            • Hoch K, Pothof F, Paul O, Ruther P
              Development and validation of a characterization setup for depth neural probes
              2015 IENSSC 2015, Istanbul, Turkey
            • Becker F, Sander C, Schmidt F, Lapatki B, Paul O
              An instrumented tooth
              2015 IEEE MEMS, Estoril, Portugal
            • Barz F, Ruther P, Takeuchi S, Paul O
              Flexible silicon-polymer neural probe rigidified by dissolvable insertion vehicle for high-resolution neural recording with improved duration
              2015 IEEE MEMS 2015, Estoril, Portugal
            • Larramendy F, Serien D, Yoshida S, Jalabert L, Takeuchi S, Paul O
              High-topography surface functionalization based on parylene-C peel-off for patterned cell growth
              2015 IEEE MEMS Conf. 2015, Estoril, Portugal
            • Sander C, Leube C, Aftab T, Ruther P, Paul O
              Isotropic 3D silicon hall sensor
              2015 IEEE MEMS, Estoril, Portugal
            • Schwärzle M, Elmlinger P, Paul O, Ruther P
              Miniaturized 3×3 optical fiber array for optogenetics with integrated 460 nm light sources and flexible electrical interconnection
              2015 IEEE MEMS Conf. 2015, Estoril, Portugal
            • Ayub S, Schwärzle M, Paul O, Ruther P
              An intracerebral probe with integrated 10x1 µLED array for optogenetic experiments at 460 nm
              2015 XXIX Eurosensors 2015, Freiburg, Germany
            • Sayed Herbawi A, Mildenberger B, Larramendy F, Holzhammer T, Galchev T, Paul O, Ruther P
              CMOS-based high-density neural probes with improved scheme for addressing recording and stimulation channels
              2015 XXIX Eurosensors 2015, Freiburg, Germany
            • Genter S, Langhof T, Paul O
              Electret-Based Out-Of-Plane Micro Energy Harvester with Parylene-C Serving as the Electret and Spring Material
              2015 XXIX Eurosensors 2015, Freiburg, Germany
            • Sander C, Leube C, Aftab T, Ruther P, Paul O
              Geometry study of an isotropic 3D Silicon Hall Sensor
              2015 XXIX Eurosensors 2015, Freiburg, Germany
            • Schwärzle M, Pothof F, Paul O, Ruther P
              High-resolution optrode with integrated light source for deeper brain regions
              2015 XXIX Eurosensors 2015, Freiburg, Germany
            • Schwärzle M et al.
              LED-based neural probes for optogenetics
              2015 Society for Neuroscience 2015, Chicago, Illinois, United States
            • Barz F, Ruther P, Takeuchi S, Paul O
              Mechanically adaptive silicon-based neural probes for chronic high-resolution neural recording
              2015 XXIX Eurosensors 2015, Freiburg, Germany
            • Bonini L, Livi A, Lanzilotto M, Maranesi A, Ruther P, Barz F, Fogassi L, Rizzolatti G
              Visuo-motor processing of objects in pre-supplementary motor area F6 neurons of the macaque
              2015 Society for Neuroscience 2015, Chicago, Illinois, United States

            2014

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            • Genter S, Paul O
              Influence of various conducting and inorganic dielectric drift barriers on the charge decay in parylene-C electret layers
              2014 PowerMEMS 2014, Awaji Island, Hyogo, Japan
            • Nomura M, Maire J, Kage Y, Moser D, Paul O
              Reduced thermal conductivity in 1D and 2D phononic crystal nanstructures
              2014 Eurotherm 103: NMHT IV, Lyon, France
            • Vysotska O, Frank B, Ulbert I, Paul O, Ruther P, Stachniss C, Burgard W
              Automatic channel selection and neural signal estimation across channels of neural probes
              2014 2014 IEEE/RSJ International Conference on Intelligent Robots and Systems, Chicago, USA , Seiten: 1453 - 1459
            • Dang W, Barz F, Paul O, Ruther P
              Technology for the highly compact interconnection of neural probes with flexible ribbon cables
              2014 MicroMechanics Europe Workshop 2014, Istanbul
            • Pothof F, Anees S, Leupold J, Bonini L, Paul O, Orban G.A, Ruther P
              Fabrication and characterization of a high-resolution neural probe for stereoelectroencephalography and single neuron recording
              2014 IEEE EMBC 2014, Chicago, USA , Seiten: 5244 - 5247
            • Schwärzle M, Elmlinger P, Paul O, Ruther P
              Miniaturized Tool for Optogenetics Based on an LED and an Optical Fiber Interfaced by a Silicon Housing
              2014 36th Ann. Int. Conf. of the IEEE Eng. in Med. and Biol. Soc. (EMBC) 2014, Chicago , Seiten: 5252 - 5255
            • Barz F, Paul O, Ruther P
              Modular assembly concept for 3D neural probe prototypes offering high freedeom of design and alignement precision
              2014 IEEE EMBC 2014, Chicago, USA , Seiten: 3977 - 3980
            • Goßler C, Schwärzle M, Ruther P, Paul O, Schwarz U.T.
              Optrodes with arrays of integrated micro-LEDs
              2014 International Workshop on Nitride Semiconductors, Wroclaw, Poland
            • Heizmann S, Kilias A, Ringwald P, Okujeni S, Böhler C, Ruther P, Egert U, Asplund M
              Precise detection of recording positions by accurate neural tracing from PEDOT-based microelectrodes
              2014 Forum of Neuroscience 2014, Milano, Italy
            • Heizmann S, Kilias A, Ringwald P, Okujeni S, Boehler C, Ruther P, Egert U, Asplund M
              Precise labeling of microelectrode positions by accurate neuronal tracing based on pedot-dye coatings
              2014 9th Forum of Neuroscience, Milano, Italy
            • Martin T, Gengenbach U, Ruther P, Paul O, Bretthauer G
              Realization of Actuator Systems for an Implantable Artificial Accommodation System
              2014 ACTUATOR 2014, Bremen, Germany
            • Paul O, Ruther P
              MEMS and more for the brain - THE cluster of excellence BrainLinks-BrainTools at the University of Freiburg
              2014 Actuator and Microsystems Workshop (Hilton Head) 2014 Proc. IEEE Solid-State Sensor, Seiten: 1 - 4
            • Sander C, Vecchi M C, Cornils M, Paul O
              Ultra-low offset vertical Hall sensor in CMOS technology
              2014 Procedia Engineering

            2013

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            • Genter S, Paul O
              Influence of a SiN drift-barrier on the charge decay in parylene-C electret layers
              2013 Power MEMS 2013, London, Great Britain
            • Schwärzle M, Paul O, Ruther P
              Characterization of silicon-based optrodes with integrated laser diode chips and SU-8 waveguides
              2013 Society for Neuroscience, San Diego/USA
            • Sayed Herbawi A, Paul O, Galchev T
              An ultra-low-power active AC-DC CMOS converter for sub-1V integrated energy harvesting applications
              2013 IEEE Sensors Conference 2013, Baltimore, USA
            • Sander C, Raz R, Ruther P, Paul O, Kaufmann T, Cornils M, Vecchi M.C.
              Fully symmetric vertical hall devices in CMOS technology
              2013 IEEE Sensors Conference 2013, Baltimore, USA
            • Barz F, Paul O, Ruther P
              3D assembly of intracortical neural probe arrays
              2013 MST-Kongress 2013, Aachen, Deutschland
            • Sander C, Cornils M, Vecchi M.C., Paul O
              Sensitivitätsoptimierung von vertikalen Hallsensoren mit drei Kontakten
              2013 MST-Kongress 2013, Aachen, Deutschland
            • Becker F, Sander C, Schmidt F, Lapatki B, Paul O
              Smart Tooth
              2013 MST-Kongress 2013, Aachen, Germany
            • Simon P, Paul O
              Novel concept and technology for a self resonant magnetic field sensor
              2013 Transducers 2013, Barcelona, Spain
            • Barz F, Holzhammer T, Paul O, Ruther P
              Novel technology for the in-plane to out-of-plane transfer of multiple interconnection lines in 3D neural probes
              2013 Transducers 2013, Barcelona, Spain
            • Wang Z, Ruhhammer J, Adhikari S, Rostek R, Moser D, Paul O, Kojda D, Mitdank R, Fischer S F, Toellner W, Nielsch K, Kroener M, Woias P
              Thermoelectric properties investigation of single nanowires by utilizing a thermoelectric nanowire characterization platform
              2013 NEMS 2013, Suzhou / China
            • Galchev T, Raz R, Paul O
              An electrostatic springless enertial harvester for converting multi-dimensional low-frequency motion
              2013 MEMS 2013 Conference, Taipeh / Taiwan
            • Schwärzle M, Seidl K, Schwarz U T, Paul O, Ruther P
              Ultracompact optrode with integrated laser diode chips and SU-8 waveguides for optogenetic applications
              2013 MEMS 2013 Conference, Taipeh / Taiwan
            • Lee Y-T, Moser D, Holzhammer T, Fang W, Paul O, Ruther P
              Ultrathin, dual-sided silicon neural microprobes realized using BCB bonding and aluminum sacrificial etching
              2013 MEMS 2013 Conference, Taipeh / Taiwan

            2012

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            • P. Pursula, J. Saarilahti, O. Paul, V. Vikari
              Analytical electromechanical modelling of a cmuts with multilayered, non-uniform thickness diaphragm
              2012 MME 2012, Ilmenau, German
            • Handwerker J, Gieschke P, Baumann M, Paul O
              CMOS Integrated Silicon/Glass-Bonded 3D Force/Torque Sensor
              2012 IEEE MEMS 2012 Conference, Paris, France
            • Baumann M, Peter A, Moser D, Ruther P, Paul O
              CMOS-Based Force Sensor withOverload Protection and Improved Assembly Tolerance
              2012 IEEE MEMS 2012, Paris, France
            • Paul O
              CMOS-integrated Four-contact Sensors for Magnetic and Mechanical Signals: Novel Devices, Systems, and Applications
              2012 IEEE Sensors 2012, Taipeh / Taiwan , Seiten: 174 - 177
            • Vittoriosi A, Brandner J J, Ruther P, Paul O, Dittmeyer R
              Design and Characterization of Integrated Microsensors for Heat Transfer Studies in Microchannels
              2012 3rd European Conference on Microfluidics (µFlu'12), Heidelberg, Germany , Band: 228, Seiten: 1 - 10
            • Moser D, Ilkaya D, Kopp D, Paul O
              Determination of the thermoelectric figure of merit of doped polysilicon thin films by micromachined test structures
              2012 IEEE Sensors 2012, Taipeh / Taiwan
            • Moser D, Seidl K, Paul O, Ruther P
              Fabrication of microfluidic neural probes with in-channel electrodes
              2012 IEEE Sensors 2012, Taipeh / Taiwan
            • Le Huy V, Kamiya S, Gaspar J, Paul O
              Identification of Fatigue Crack Extension Process in Zero-Tension Cyclic Stress Test of Polysilicon Films
              2012 IEEE MEMS 2012 Conference, Paris, France
            • Lemke B, Paul O
              MEMS Systems for Microelectronic Packaging Testing
              2012 NMJ2012, Beijing, China
            • Huber S, Paul O
              Package stress monitor to compensate for the piezo-Hall effect in CMOS hall sensors
              2012 IEEE Sensors 2012, Taipeh / Taiwan
            • Mueller J, Paul O, Burgard W
              Probabilistic Velocity Estimation for Autonomous Miniature Airships using Thermal Air Flow Sensors
              2012 2012 IEEE International Conference on Robotics and Automation, Saint Paul, Minnesota, USA , Seiten: 39 - 44
            • Stephan J, Retan K, Ruther P, Paul O
              The inverse magnetic shape memory effect in membranes for pressure sensor applications
              2012 IEEE Sensors 2012, Taipeh / Taiwan

            2011

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            • Kaufmann T, Kopp D, Kunzelmann M, Ruther P, Paul O
              Piezo-Hall Effect of CMOS-Based Vertical Hall Devices
              2011 IEEE Sensors 2011 Conference, Limerick, Ireland , Seiten: 440 - 443
            • M. Kuhl, P. Gieschke, O. Paul, Y. Manoli
              A Differential Difference Amplifier With Automatic Gain Selection as Readout Interface for CMOS Stress Sensors in Orthodontic Brackets
              2011 Transducers'11, Beijing, China , Seiten: 819 - 822
            • M. Kuhl, P. Gieschke, D. Rossbach, S.A. Hilzensauer, P. Ruther, O. Paul, Y. Manoli
              A Telemetric Stress-Mapping CMOS Chip with 24 FET-Based Stress Sensors for Smart Orthodontic Brackets
              2011 2011 IEEE International Solid-State Circuits Conference , Seiten: 108 - 110
            • Martin Th, Gengenbach U, Guth H, Ruther P, Paul O, Bretthauer G
              Actuation of an Intraocular Implant Based on a Compliant Silicon Mechanism and a Piezoelectric Bender with Energy Efficient Driving Electronics
              2011 45. DGBMT Jahrestagung, Freiburg, Germany Proceeding BMT 2011
            • S. Herwik, T. Holzhammer, O. Paul, P. Ruther
              Assembly Method for 3D Neural Probe Arrays Utilizing SU-8-based Thermal Actuators
              2011 DGBMT Jahrestagung, Freiburg, Germany , Band: 56
            • Seidl K, Herwik S, Torfs T, Neves H P, Paul O, Ruther P
              CMOS-Based High-Density Silicon Microprobe Arrays for Electronic Depth Control in Intracortical Neural Recording
              2011 45. DGBMT Jahrestagung, Freiburg, Germany Proceedings BMT 2011
            • P. Ruther, T. Holzhammer, S. Herwik, P. D. Rich, J. W. Dalley, O. Paul, T. Holtzman
              Compact Wireless Neural Recording System for Small Animals Using Silicon-based Probe Arrays
              2011 33rd Annual International Conference of the IEEE EMBS , Seiten: 2284 - 2287
            • Holzhammer T, Holztman T, Herwik S, Rich P D, Dalley J W, Paul O, Ruther P
              Compact Wireless Silicon-based Recording System for Small Animals
              2011 45. DGBMT Jahrestagung, Freiburg, Germany Prodeedings BMT 2011
            • Ramirez H, Seidl K, Ulbert I, Paul O, Ruther P, Karwath A
              Detection of Activity Levels in High-Density Intracortical Neural Recordings Using a Machine Learning Approach
              2011 45. DGBMT Jahrestagung, Freiburg, Germany Proceedings BMT 2011
            • Stephan J, Retan K, Ruther P, Paul O
              Effects of Temperature Treatment on Strain Sensors Based on the Ferromagnetic Shape Memory Alloy NiMnGa
              2011 IEEE Sensors 2011 Conference, Limerick, Ireland
            • S. Kamiya, Y. Ikeda, M. Ishikawa, H. Izumi, J. Gaspar, O. Paul
              Finite Fatigue Lifetime of Silicon Under Inert Environment
              2011 , Seiten: 432 - 435
            • M. Baumann, C. Sander, P. Ruther, O. Paul
              Impact of Encapsulation Materials on the Performance of Silicon-Based Solid State High Pressure Sensors With Surface Trenches
              2011 Transducers'11, Beijing, China , Seiten: 2883 - 2886
            • D. Moser, A. Steffen, O. Paul
              Microstructure for the Determination of the Seebeck Coefficients of Doped Polysilicon Thin Films
              2011 9th European Conference on Thermoelectrics, Thessaloniki/Greece, 28.-30.09.2011
            • M. Baumann, P. Ruther, O. Paul
              Modeling and Characterization of a CMOS Sensor With Surface Trenches for High-Pressure Applications
              2011 MEMS 2011 / Cancun, Mexico , Seiten: 601 - 604
            • Froriep U P, Holzhammer T, Herwik S, Rich P D, Dalley J W, Paul O, Ruther P
              Multisite Electrode Arrays for Simultaneous LPF and Spike Recording in Freely Behaving Epileptic Mice
              2011 45. DGBMT Jahrestagung - Freiburg, Germany Proceedings BMT 2011
            • J. Gaspar, J. Gutmann, B. Lemke, O. Paul
              Nonlinear Piezoresistance of Silicon at Large Stresses
              2011 IEEE MEMS 2011/ Cancun, Mexiko , Seiten: 469 - 472
            • T. Kaufmann, F. Purkl, P. Ruther, O. Paul
              Novel Coupling Concept for Five-Contact Vertical Hall Devices
              2011 Transcucers'11, Beijing, China , Seiten: 2855 - 2858
            • S. Herwik, T. Holzhammer, O. Paul, P. Ruther
              Out-of-Plane Assembly of 3D Neural Probe Arrays Using a Platform With SU-8-Based Thermal Actuators
              2011 Transducers'11, Beijing, China , Seiten: 2323 - 2326
            • T. Martin, U. Gengenbach, P. Ruther, O. Paul, G. Bretthauer
              Silicon Linkage With Novel Compliant Mechanism for Piezoelectric Actuation of an Intraocular Implant
              2011 Transducers'11, Beijing, China , Seiten: 1480 - 1483
            • B. Lemke, S. Ganapathysubramanian, R. Baskaran, O. Paul, P. Nardi
              Stress Mapping Below Flip-Chip Bumps With High Spatial Resolution Using Piezoresistive CMOS Sensors
              2011 InterPACK2011, Portland, Oregon, USA , Ergänzungsband: 52124, Seiten: 1 - 10
            • Seidl K, Ulbert I, Paul O, Ruther P
              Validation of Electronic Depth Control Using CMOS-based High-Density Silicon Microprobe Arrays
              2011 45. DGBMT Jahrestagung, Freiburg, Germany Proceedings BMT 2011

            2010

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            • V. Le Huy, J. Gaspar, O. Paul, S. Kamiya
              A Novel Fatigue Test with Ramping Stress Amplitude to Evaluate Fatigue Behaviour of Polysilicon Thin Films
              2010 IEEE MEMS2010/Hong Kong, China , Seiten: 220 - 223
            • Th. Martin, U. Gengenbach, P. Ruther, O. Paul, G. Bretthauer
              Acutation of a Triple-optics for an Intraocular Implant Based on a Piezoelectric Bender and a Compliant Silicon Mechanism
              2010 12th Int. Conference on New Actuators , Seiten: 81 - 84
            • M. Baumann, P. Gieschke, B. Lemke, O. Paul
              CMOS Sensor Chip with a 10x10 Array of Unit Cells for Mapping Five Stress Components and Temperature
              2010 IEEE International Conference on MEMS2010, Hong Kong, China , Seiten: 604 - 607
            • K. Seidl, B. Lemke, H. Ramirez, S. Herwik, P. Ruther, O. Paul
              CMOS-based High-Density Silicon Microprobe for Stress Mapping in Intracortical Applications
              2010 IEEE International Conference on MEMS 2010, Hong Kong, China , Seiten: 35 - 38
            • M. Baumann, P. Ruther, O. Paul
              CMOS-based High-Pressure Sensor Using Surface Trenches for Sensitivity Enhancement
              2010 IEEE SENSORNS 2010 Conference, Waikoloa, USA , Seiten: 2644 - 2647
            • P. Gieschke, O. Paul
              CMOS-integrated Sensor Chip for In-Plane and Out-of-Plane Shear Stress
              2010 Eurosensors XXIV 2010, Linz, Austria , Seiten: 1364 - 1367
            • P. Ruther, M. Baumann, P. Gieschke, M. Herrmann, B. Lemke, K. Seidl, O. Paul
              CMOS-integrated Stress Sensor Systems
              2010 IEEE SENSORS 2010 Conference, Waikoloa, USA , Seiten: 2073 - 2077
            • M. Herrmann, P. Gieschke, P. Ruther, O. Paul
              CMOS-integrated Three-Axis Force Sensor for Coordinate Measurement Applications
              2010 IEEE SENSORS 2010 Conference, Waikoloa, USA , Seiten: 2648 - 2652
            • G.J. Suanning, S. Kisban, S.C. Chen, P.J. Byrnes-Preston, C. Dodds, C. Tsai, P. Matteucci, S. Herwik, J.W. Morley, N.H. Lovell, O. Paul, T. Stieglitz, P. Ruther
              Discrete Cortical Responses from Multi-site Supra-Choroidal Electrical Stimulation in the Feline Retina
              2010 32nd Annual International Conference of the IEEE EMBS 2010, Buenos Aires, Argentina , Seiten: 5879 - 5882
            • P. Koester, C. Tautorat, J. Held, P. Ruther, J. Gaspar, O. Paul, H. Beikirch, J. Gimsa, W. Baumann
              GO-Bio 3: PoreGenic -2. Cardiomyocyte Action Potential Recordings with a 3D-MEA chip
              2010 7th Int. Meeting on Substrate-Integrated Microelectrode Arrays, Reutlingen, Germany , Seiten: 293 - 294
            • P. Koester, C. Tautorat, J. Held, P. Ruther, J. Gaspar, O. Paul, H. Beikirch, J. Gimsa, W. Baumann
              Go-Bio3: PoreGenic -1. Whole-Cell Patch Clamp Recordings with a 3D-MEA chip
              2010 7th Int. Meeting on Substrate-Integrated Microelectrode Arrays, Reutlingen, Germany , Seiten: 291 - 292
            • J. Stephan, E. Pagounis, M. Laufenberg, P. Ruther, O. Paul
              Mechanical Sensing Based on Ferromagnetic Shape Memory Alloys
              2010 IEEE SENSORS 2010 Conference, Waikoloa, USA , Seiten: 2577 - 2580
            • B. Lemke, M. Schmidt, J. Gutmann, P. Gieschke
              Nonlinear Piezoresistance of Silicon
              2010 IEEE SENSORS 2010, Waikoloa, USA , Seiten: 1950 - 1953
            • S. Kisban, T. Holzhammer, S. Herwik, O. Paul, P. Ruther
              Novel Method for the Assembly and Electrical Contacting of Out-of-Plane Microstructures
              2010 23rd IEEE International Conference on MEMS 2010, Hong Kong, China , Seiten: 484 - 487
            • J. Gaspar, M. Schmidt, G. Pedrini, W. Osten, O. Paul
              Out-of-Plane Electrostatic Microactuators with Tunable Stiffness
              2010 23rd IEEE International Conference on MEMS, Hong Kong, China , Seiten: 1131 - 1134
            • B. Lemke, R. Baskaran, O. Paul
              Piezoresistive CMOS Sensor for the Localized Measurement of Five Independent Stress Components
              2010 23rd IEEE International Conference on MEMS, Hong Kong, China , Seiten: 596 - 599
            • M. Kaufmann, D. Kopp, F. Purkl, M. Baumann, P. Ruther, O. Paul
              Piezoresistive Response of Five-contact Vertical Hall Devices
              2010 IEEE SENSORS 2010 Conference, Waikoloa, USA , Seiten: 562 - 565
            • J. Held, J. Gaspar, P. Ruther, M. Hagner, A. Cismak, A. Heilmann, O. Paul
              Solid Silver Microneedle Electrode Arrays for Intracellular Recording Applications
              2010 7th Meeting on Substrate-Integrated Microelectrode Arrays, Reutlingen, Germany , Seiten: 247 - 248
            • B. Lemke, R. Baskaran, S. Ganapathysubramanian, O. Paul
              Stress Distribution Under Electroless Nickel Bumps Extracted Using Arrays of 7x7 Piezo-FETs
              2010 IEEE SENSORS 2010 Conference, Waikoloa, USA , Seiten: 2573 - 2576
            • P. Alpuim, P. Gieschke, C. Ehling, E. Marins, M.I. Vasilevskiy, M.B. Schubert, J. Gaspar, O. Paul
              Study of the Piezoresistivity of Doped Nanocrystalline Silicon Thin Films
              2010 E-MRS Spring Meeting 2010, Strasbourg, France
            • G. van Dijck, A. Jezzini, S. Herwik, S. Kisban, K. Seidl, O. Paul, P. Ruther, F. Ugolotti Serventi, L. Fogassi, M. van Hulle, M. Umiltà
              Towards Automated Electrode Selection in the Electronic Depth Control Strategy for Multi-uni Recording
              2010 ICONIP 2010, Sydney, Australia , Seiten: 17 - 25

            2009

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            • U. Bartsch, J. Gaspar, O. Paul
              A 2D electret-based resonant micro energy harvester
              2009 22nd IEEE International Conference on MEMS 2009 , Seiten: 1043 - 1046
            • S. Kisban, J. Kenntner, P. Janssen, R. v. Metzen, S. Herwik, U. Bartsch, T. Stieglitz, O. Paul, P. Ruther
              A Novel Assembly Method for Silicon-Based Neural Devices
              2009 WC 2009, München, Germany , Seite: 107-110
            • A.A.A. Aarts, H.P. Neves, R.P. Puers, S. Herwik, K. Seidl, P. Ruther, C. van Hoof
              A slim out-of-plane 3D implantable CMOS based probe array
              2009 Smart Systems Integration , Seiten: 258 - 263
            • P. Gieschke, Y. Nurcahyo, M. Herrmann, M. Kuhl, P. Ruther, O. Paul
              CMOS integrated stress mapping chips with 32 N-type or P-type piezoresistive field effect transistors
              2009 22nd IEEE International Conference on MEMS, Sorrento, Italy , Seiten: 769 - 772
            • K. Seidl, S. Herwik, Y. Nurcahyo, T. Torfs, M. Keller, M. Schüttler, H. Neves, T. Stieglitz, O. Paul, P. Ruther
              CMOS-based high-density silicon microprobe array for electronic depth control in neural recording
              2009 22nd IEEE International Conference on MEMS, Sorrento, Italy , Seiten: 232 - 235
            • T. Alan, J. Gaspar, O. Paul, H.W. Zandbergen, F. Creemer, P.M. Sarro
              Characterization of Ultrathin Membranes to Enable TEM Observation of Gas Reactions at High Pressures
              2009 ASME 2009 Congress & Exposition IMECE2009, Lake Buena Vista, Florida, USA , Seiten: 1 - 5
            • J. Gaspar, J. Held, G. Pedrini, W. Osten, O. Paul
              Development of calibration standards for the optical measurement of in-plane displacements of micromechanical components
              2009 22nd IEEE International Conference on MEMS, Sorrento, Italy , Seiten: 7 - 10
            • R. von Metzen, D. Egert, P. Ruther, T. Stieglitz
              Diffusion Limited Tapered Coating with Parylene C
              2009 WC 2009, München, Germany , Seiten: 96 - 99
            • T. Kawai, J. Gaspar, V. Le Huy, O. Paul, S. Kamiya
              Evaluation of Fatigue Behavior of Polysilicon Thin Films
              2009 JSME Mechanical Engineering Congress 2009, Morioka, Japan , Seiten: 59 - 60
            • B. Lemke, R. Baskaran, O. Paul
              Evaluation of the Accuracy of Out-of-Plane Normal Stress Detection Using Novel Piezoresistive CMOS Sensors
              2009 ASME 2009 InterPACK Conference, San Francisco, California, USA , Seiten: 1 - 7
            • H. Al Saeed, B. Panchaphongsaphak, P. Gieschke, I. Jonas B. Lapatki
              Experimentelle Bestimmung der Drehmoment-Kraft-Verhältnisse verschiedener Closing-Loops
              2009 82. Wissenschaftliche Jahrestagung, Deutsche Gesellschaft für Kieferorthopädie e.V. Mainz, Germany , Seite: Paper V4
            • M.E. Schmidt, J. Gaspar, J. Held, S. Kamiya, O. Paul
              Highly efficient extraction of mechanical and linear and quadratic piezoresistive properties of poly-Si films using wafer-scale microtensile testing
              2009 22nd IEEE International Conference on MEMS, Sorrento, Italy , Seiten: 599 - 602
            • J. Held, J. Gaspar, P.J. Koester, C. Tautorat, M. Hagner, A. Cismack, A. Heilmann, W. Baumann, P. Ruther, O. Paul
              Hollow Microneedle electrode arrays for intracellular recording applications
              2009 22nd IEEE International Conference on MEMS, Sorrento, Italy , Seiten: 220 - 223
            • J. Held, J. Gaspar, M. Hagner, P. Ruther, O. Paul
              Hollow microneedle electrode arrays for intracellular recording applications
              2009 6. Deutsches BioSensor Symposium, Freiburg, Germany , Seite: 108
            • U. Bartsch, C. Sander, M. Blattmann, J. Gaspar, O. Paul
              Influence of Parasitic Capacitances on the Power Output of Electret-Based Energy Harvesting Generators
              2009 PowerMEMS 2009, Washington DC, USA , Seiten: 332 - 335
            • J. Held, J. Gaspar, P.J. Koester, C. Tautorat, M. Hagner, C. Cismak, A. Heilmann, W. Baumann, P. Ruther, O. Paul
              Integration of Microfluidic Features with Microneedle Electrode Arrays for Intracellular Recording Applications
              2009 Mikrosystemtechnik Kongress 2009, Berlin, Germany VDE Verlang GmbH, Seite: Paper P3.1
            • K. Sriperumbudur, P. Koester, M. Stubbe, C. Tautorat, J. Held, W. Baumann, J. Gimsa
              Local Electroporation of Sigle Adherent Cells by Micro-Structured Needle Electrodes
              2009 COMSOL Conference 2009, Bangalore, India
            • J. Gaspar, T. Smorodin, M.E. Schmidt, C. Bohm, M. Stecher, O. Paul
              Mechanical Characterization of CMOS Metal Layers
              2009 Transducers 2009, Denver, CO, USA , Seiten: 1706 - 1709
            • M. Baumann, B. Lemke, P. Ruther, O. Paul
              Piezoresistive CMOS Sensors for Out-of-Plane Shear Stress
              2009 IEEE Sensors 2009, Christchurch, New Zealand
            • T. Kawai, J. Gaspar, O. Paul, S. Kamiya
              Prediction of Strength and Fatigue Lifetime of MEMS Structures with Arbitrary Shapes
              2009 Transducers 2009, Denver, CO, USA , Seiten: 1067 - 1070
            • S. Hillebrecht, S. Herwik, I. Polian, P. Ruther, B. Becker, O. Paul
              Reliability characterization of interconnects in CMOS integrated circuits under mechanical stress
              2009 IEEE CFP09RPS-CDR 47th Annual International Reliability Physics Symposium, Montreal, Canada , Seiten: 562 - 567
            • M. Cornils, O. Paul
              The Magnetic Calibration of Arbitrarily Shaped Hall Sensors in the Absence of Magnetic Fields
              2009 Transducers 2009, Denver, CO, USA , Seiten: 881 - 884
            • B. Lemke, K. Kratt, R. Baskaran, O. Paul
              Towards piezoresistive CMOS sensors for out-of-plane stress
              2009 22nd IEEE International Conference on MEMS, Sorrento, Italy , Seiten: 781 - 784
            • B. Panchaphongsaphak, S. Rues, P. Gieschke, O. Paul, I.E. Jonas, B.G. Lapatki
              Untersuchung der Messgenauigkeit von intelligenten Brackets mittels Finite-Elemente-Analyse
              2009 82. Wissenschaftliche Jahrestagung, Deutsche Gesellschaft für Kieferorthopädie e.V. Mainz, Germany

            2008

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            • A.A.A. Arts, H.P. Neves, I. Ulbert, L. Wittner, L. Grand, M.B.A. Fontes, S. Herwik, S. Kisban, O. Paul. P. Ruther, R.P. Puers, C. von Hoof
              A 3D Slim-Base Probe Array for in Vivo Recorded Neuron Activity
              2008 IEEE EMBS Conference, Vancouver, Canada , Seite: 5798-5801
            • A.A.A. Aarts, S. Herwik, S. Kisban, P. Janssen, E. Göthelid, S. Oscarsson, M.B.A. Fontes, T. Stieglitz, O. Paul, P. Ruther, C. van Hoof
              A Silicon-Based Three-Dimensional Microprobe Array for Chronic Neural Recording
              2008 SfN Annual Meeting 2008, Washington
            • G. Girardeau, K. Benchenane, S. Herwik, S. Kisban, P. Ruther, S.I. Wiener, G. Buzsaki, M.B. Zugaro
              Abolishing hippocampal ripples by timed stimulation: effects of learning
              2008 SfN Annual Meeting 2008, Washington
            • M. Cornils, O. Paul
              Beyond von der Pauw: Sheet Resistance Determination from Arbitrarily Shaped Planar Four-Terminal Devices with Extended Contacts
              2008 IEEE Conference on Microelectronic Test Structures, Edinburgh, UK , Seiten: 23 - 28
            • O. Paul, P. Gieschke, B. Lemke
              CMOS-Integrated Stress Sensor Systems for Mechanical Sensing and Packaging Reliability Testing
              2008 Materials Research Society Symposium, Warrendate , Seite: 1139-GG04-
            • U. Bartsch, J. Gaspar, O. Paul
              Characterization of the Charging and Long-Term Performance of Cytop Electret Layers for MEMS Applications
              2008 MRS Fall Meeting 2008, Boston, USA
            • M. Herrmann, P. Gieschke, Z. Liu, J. Korvink, P. Ruther, O. Paul
              Design and Characterization of In-Plane Silicon Stress Sensors with Isotropic Sensitivity
              2008 IEEE SENSORS 2008 Conference , Seiten: 1528 - 1531
            • J. Gaspar, J. Held, G. Pedrini, W. Osten, O. Paul
              Development of Calibration Standards for In-Plane Displacements of Microcomponents
              2008 Eurosensors XXII, Dresden, Germany , Seiten: 613 - 616
            • J. Gaspar, M. Schmidt, J. Held,, O. Paul
              Evaluation of the mechanical properties of aluminum thin films as a function of strain rate using the wafer-scale microtensile technique
              2008 MRS Fall Meeting 2008, Boston, USA
            • S. Herwik, S. Kisban, A.A.A. Aarts, K.Seidl, G.Girardeau, K.Benchenane, M.B.Zugaro, S.I.Wiener, H.P.Neves, O.Paul, P.Ruther
              FABRICATION TECHNOLOGY FOR SILICON BASED MICROPROBE ARRAYS USED IN ACUTE AND SUBCHRONIC NEURAL RECORDING
              2008 19th MicroMechanics Europe Workshop 2008, Aachen, Germany , Seiten: 57 - 60
            • S. Herwik, S. Kisban, A.A.A. Aarts, K. Seidl, G. Girardeau, K. Benchenane, M.B. Zugaro, S.I. Wiener, H.P. Neves, O. Paul, P. Ruther
              Fabrication Technology for Silicon Based Microprobe Arrays used in Acute and Subchronic Neural Recording
              2008 19th MicroMechanics Europe Workshop 2008, Aachen, Germany , Seiten: 57 - 60
            • S. Herwik, S. Kisban, P. Janssen, S. Srivastava, K. Benchenane, G. Girardeau, M.B. Zugaro, S.I. Wiener, E. Fernandez, M. Bongard, I. Ulbert, L. Wittner, A. Jezzini, M.A. Ulmilta, L. Fogassi, T. Stieglitz, O. Paul, H.P. Neves, P. Ruther
              Fabrication and validation of 1D and 2D electrode arrays for cerebral applications developed in the framework of the NeuroProbes Project
              2008 SfN Annual Meeting 2008, Washington
            • S. Kisban, D. Moser, B. Rubehn, T. Stieglitz, O. Paul, P. Ruther
              Fatigue Testing of Polyimide-Based Micro Implants
              2008 ECIFMBE 2008 , Seiten: 1594 - 1597
            • P. Gieschke, J. Richter, J. Joos, P. Ruther, O. Paul
              Four-Degree-of-Freedom Solid State MEMS Joystick
              2008 IEEE International Conference on MEMS 2008, Tucson, Arizon, USA , Seiten: 86 - 89
            • J. Gaspar, M. Schmidt, J. Held, O. Paul
              High-Throughput Wafer-Scale Microtensile Testing of Thin Films
              2008 IEEE International Conference on MEMS 2008, Tucson, Arizona, USA , Seiten: 439 - 442
            • E. Göthelid, C. Granstam, S. Herwik, P. Ruther, H. Neves, S. Oscarsson
              Hyaluronic acid grafting on silicon surfaces
              2008 ISTEC-CNR, Faenza, Italy , Seiten: 81 - 91
            • S. Kisban, P. Janssen, S. Herwik, T. Stieglitz, O. Paul, P. Ruther
              Hybrid Microprobes for Chronic Implantation in the Cerebral Cortex
              2008 IEEE EMBS Conference, Vancouver, Canada , Seiten: 2016 - 2019
            • P. Gieschke, Y. Nurcahyo, M. Herrmann, M. Kuhl, P. Ruther, O. Paul
              Integrated Stress Mapping Chip with 32 Piezoresistive Field Effect Transistors
              2008 Eurosensors XXII, Dresden, Germany , Seiten: 292 - 295
            • C. Tautorat, P.J. Koester, J. Held, J. Gaspar, P. Ruther, O. Paul, A. Cismak, A. Heilmann, J. Gimsa, H. Beikrich, L. Jonas, W. Baumann
              Intracellular Potential Measurement of Adherently Growing Cells Using Micro-Needle Arrays
              2008 µ-TAS, San Diego, California, USA , Seiten: 1777 - 1780
            • P. Koester, C. Tautorat, J. Held, J. Gaspar, P. Ruther, O. Paul, A. Cismak, A. Heilmann, J. Gimsa, W. Baumann
              Local Micro-Invasive Needle Electroporation (LOMINE) of Single Cells Attached on Silicon Chips
              2008 13th International Biotechnology Symposium (IBS) and Exhibition, Dalian, China , Seiten: 462 - 462
            • U. Bartsch, M. Blattmann, J. Gaspar, O. Paul
              Low-Frequency 2D Resonators for Vibrational Micro Energy Harvesting Applications
              2008 PowerMEMS 2008 + microEMS 2008, Sendai, Japan , Seiten: 57 - 60
            • U. Bartsch, T. Huesgen, J. Gaspar, P. Woias, O. Paul
              Low-Temperature Adhesive Flip-Chip Bonding Using Cytop Combined with Electrical Stud Bump Interconnects
              2008 MME-Workshop, Aachen, Germany , Seiten: 411 - 414
            • J. Gaspar, O. Paul, V. Chu, J.P. Conde
              Mechanical Properties and Reliability of Amorphous vs. Polycrystalline Silicon Thin Films
              2008 MRS Spring Meeting Material Research Society, Band: 1066, Seite: 1066-A15-0
            • J. Held, J. Gaspar, P.J. Koester, C. Tautorat, A. Cismak A. Heilmann, W. Baumann, A. Trautmann, P. Ruther, O. Paul
              Microneedle Arrays for Intracellular Recording Applications
              2008 IEEE International Conference on MEMS 2008, Tucson, Arizona, USA , Seiten: 268 - 271
            • J. Held, J. Gaspar, P. Ruther, O. Paul
              Microneedle Electrode Arrays with Dielectrophoresis Electrodes for Intracellular Recording Applications
              2008 Meeting on Substrate-Integrated Microelectrodes MEA, Reutlingen, Germany , Seiten: 299 - 300
            • S. Spieth, A. Schumacher, K. Seidl, K. Hiltmann, S. Haeberle, R. McNamara, J.W. Dalley, S. Edgley, P. Ruther, R. Zengerle
              Microprobe systems for neural recording and drug delivery
              2008 Neuroscience 2008, Washington DC, USA
            • T. Smorodin, Ch. Bohm, J. Gaspar, M. Schmidt, O. Paul, M. Stecher
              Modeling and improvement of a metallization system subjected to fast temperature cycle stress
              2008 EuroSimE, Freiburg, Germany , Seiten: 173 - 178
            • T. Kawai, S. Amaki, J. Gaspar, P. Ruther, O. Paul, S. Kamiya
              Prediction of Fatigue Lifetime Based on Static Strength and Crack Extension Law-Fatigue Test of MEMS Materials Becomes Unnecessary
              2008 IEEE International Conference on MEMS 2008, Tucson, Arizon, USA , Seiten: 431 - 434
            • S. Brugger, O. Paul
              Resonant Magnetic Microsensor with µT Resolution
              2008 IEEE International Conference on MEMS 2008, Tucson, Arizona, USA , Seiten: 944 - 947
            • S. Spieth, A. Schumacher, K. Seidl, K. Hiltmann, S. Haeberle, R. McNamara, J.W. Dalley, S. Edgley, P. Ruther, R. Zengerle
              Robust microprobe systems for simultaneous neural recording and drug delivery
              2008 ECIFMBE 2008 , Seiten: 2426 - 2430
            • S. Khumpuang, P. Ruther, O. Paul
              SU-8 Patterning on Inclined Surfaces for Micromold Fabrication
              2008 19th MicroMechanics Europe Workshop 2008, Aachen, Germany , Seiten: 109 - 112
            • S. Khumpuang, P. Ruther, O. Paul
              SU-8 patterning on inclined surfaces for micromold fabricarion
              2008 19th MicroMechanics Europe Workshop 2008, Aachen, Germany , Seiten: 109 - 112
            • P. Gieschke, O. Paul, I.E. Jonas, B.G. Lapatki
              Smart Bracket for 3D-Force-Moment Monitoring in Orthodontics
              2008 ESB Congress, Luzern, Switzerland , Seite: 216
            • M. Schmidt, J. Gaspar, J. Held, O. Paul
              Strain Rate Dependent Mechanical Properties of Aluminium Thin Films Measured Using the Microtensile Test
              2008 Eurosensors XXII, Dresden, Germany , Seiten: 1603 - 1606
            • M. Cornils, O. Paul
              The Magnetic Calibration and Optimization of Symmetric Hall Plates May be Accomplished even in the Absence of a Magnetic Field
              2008 IEEE International Conference on MEMS 2008, Tucson, Arizona, USA , Seiten: 940 - 943
            • P. Ruther, A. Arts, O. Frey, S. Herwik, S. Kisban, K. Seidl, S. Spieth, A. Schumacher, M. Koudelka-Hep, O. Paul, T. Stieglitz, R. Zengerle, H. Neves
              The NeuroProbes Project - Multifunctional Probe Arrays for Neuro Recording and Stimulation
              2008 Annual Conference of the IFESS, Freiburg, Germany , Seiten: 238 - 240
            • H.P. Neves, T. Torfs, R.F. Yazicioglu, J. Aslam, A.A. Aarts, P. Merken, P. Ruther,, C. Van Hoof
              The NeuroProbes project: a concept for electronic depth control
              2008 30th Annual International IEEE EMBS Conference, Vancouver, Canada , Seiten: 1857 - 1857
            • T. Huesgen, U. Bartsch, B. Albrecht, P. Vulto, J. Gaspar, P. Woias
              Wafer-Level Dry-Film Photoresist Adhesive Bonding for 3D-MEMS Integration and Packaging
              2008 MME, Aachen, Germany , Seiten: 255 - 258

            2007

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            • U. Bartsch, C. Bretthauer, T. Hehn, B. Mack, T. Ungan, Y. Manoli, O. Paul, L. Reindl, H. Reinecke, U. Wallrabe
              Angewandtes "Micro Energy Harvesting"-Systemkonzept für energieautarke Mikrosysteme
              2007 Mikrosystemtechnik Kongress 2007 , Seiten: 797 - 800
            • J. Gaspar, T. Smorodin, M. Stecher, O. Paul
              Bulge testing of silicon nitride thin films at the wafer level
              2007 Mikrosystemtechnik Kongress 2007, Dresden, Germany , Seiten: 881 - 884
            • P. Gieschke, J. Held, M. Dölle, J. Bartholomeyczik, P. Ruther, O. Paul
              CMOS Integrated Smart Cilia
              2007 Mikrosystemtechnik Kongress 2007, Dresden , Seiten: 381 - 384
            • B. Levey, P. Gieschke, M. Dölle, S. Spinner, A. Trautmann, P. Ruther, O. Paul
              CMOS-Integrated Silicon 3D Force Sensor System for Micro Component Coordinate Measurement Machines
              2007 IEEE MEMS Conference, Kobe, Japan , Seiten: 611 - 614
            • P. Ruther, S. Spinner, M. Cornils, O. Paul
              Cantilever-Based Tactile Sensor With Improved Sensitivity for Dimensional Metrology of Deep Narrow Drillings
              2007 Transducers & Eurosensors'07, Lyon, France , Seiten: 1469 - 1472
            • S. Spinner, M. Cornils, O. Paul, P. Ruther
              Cantilever-Based Tactile Sensor With Improved Sensitivity for Dimensional Metrology of Microcomponents
              2007 Mikrosystemtechnik Kongress 2007, Dresden
            • K. Seidl, S. Spieth, S. Herwik, O. Paul, P. Ruther
              Cerebral Microprobes for Neural Recording Combined With Fluidic Functionality
              2007 Biomed Tech, Berlin, Germany
            • J. Held, J. Gaspar, P. Ruther, O. Paul
              Characterization of the DRIE Fabrication of Cell-Penetrating Microneedles
              2007 Mikrosastemtechnik Kongress 2007, Dresden, Germany , Seiten: 845 - 848
            • N. Haj-Hosseini, R. Hoffmann, S. Kisban, T. Stieglitz, O. Paul, P. Ruther
              Comparative Study on the Insertion Behavior of Cerebral Microprobes
              2007 IEEE EMBS 2007, Lyon, France , Seiten: 4711 - 4714
            • J. Gaspar, M. Schmidt, O. Paul
              Comparison of Improved Bulge and Microtensile Techniques for Mechanical Thin Film Characterization-Application of Polysilicon
              2007 Transducers & Eurosensors'07, Lyon, France , Seiten: 575 - 578
            • H.P. Neves, G.A. Orban, M. Koudelka-Hep, T. Stieglitz, P. Ruther
              Development of Modular Multifunctional Probe Arrays for Cerebral Applications
              2007 IEEE EMBS Conf. on Neural Engineering, Kohala Coast, Hawaii, USA , Seiten: 104 - 109
            • U. Bartsch, A. Trautmann, P. Ruther, J. Gaspar, O. Paul
              Electromechanical Transducers for Micro Energy Harvesting Based on SOI-Technology
              2007 Transducers & Eurosensors'07, Lyon, France , Seiten: 141 - 144
            • U. Bartsch, J. Gaspar, P. Ruther, O. Paul
              Electrostatic Micro Energy Harvesting Devices Based on SOI-Technology
              2007 Mikrosystemtechnik Kongress 2007, Dresden, Germany , Seiten: 785 - 788
            • U. Bartsch, P. Ruther, O. Paul
              Elektromechanischer Energiewandler basierend auf SOI-Technologie
              2007 Technisches Messen 74, Oldenbourg Verlag, Seiten: 636 - 641
            • P. Gieschke, B. Lapatki, J. Bartholomeyczik, O. Paul
              First 1:1 Scale Smart Orthodontic Bracket
              2007 Smart System Integration, Paris, France , Seiten: 207 - 214
            • S. Kamiya, T. Ozeki, K. Hirata, J. Gaspar, O. Paul, T. Inoue, H. Jindo
              Fracture Strength and Fatigue Lifetime Prediction of Single Crystalline Silicon on the Basis of Process Induced Damages
              2007 Int. Conf. on Advanced Technology in Experimental Mechanics, Fukuoka, Japan , Seiten: 41 - 46
            • S. Brugger, O. Paul
              Geometric Optimization and Microstructuring of Magnetic Concentrators for a Resonant Magnetic Sensor
              2007 Transducers & Eurosensors'07, Lyon, France , Seiten: 2377 - 2380
            • J. Gaspar, Y. Nurcahyo, P. Ruther, O. Paul
              Mechanical Characterization of Silicon Nitride Thin-Films Using Microtensile Specimens With Integrated 2D Diffraction Gratings
              2007 IEEE MEMS Conference 2007, Kobe, Japan , Seiten: 223 - 226
            • J. Gaspar, P. Ruther, O. Paul
              Mechanical Characterization of Thin-Film Composites Using the Load-Deflection Response of Multilayer Membranes - Elastic and Fracture Properties
              2007 Materials Research Society Symposium 2007, Boston, USA
            • P. Ruther, B. Lapatki, A. Trautmann, O. Paul
              Micro Needle Based Electrode Arrays for Surface Electromyography
              2007 Mikrosystemtechnik Kongress 2007, Dresden, Germany , Seiten: 735 - 738
            • S. Kisban, S. Herwik, K. Seidl, B. Rubehn, A. Jezzini, M.A. Umiltà, L. Fogassi, T. Stieglitz, O. Paul, P. Ruther
              Microprobe Array With Low Impedance Electrodes and Highly Flexible Polyimide Cables for Acute Neural Recording
              2007 Int. Conf. of the IEEE EMBS, Lyon, France , Seiten: 175 - 178
            • J. Gaspar, M. Schmidt, J. Held, O. Paul
              Microtensile Testing of Thin-Film Materials
              2007 Mikrosystemtechnik Kongress 2007, Dresden, Germany , Seiten: 865 - 868
            • P. Ruther, S. Herwik, S. Kisban, K. Seidl, S. Spieth, B. Rubehn, N. Haj-Hosseini, J. Steigert, M. Daub, O. Paul, T. Stieglitz, R. Zengerle, H. Neves
              NeuroProbes - Development of Modular Multifunctional Probe Arrays for Neuroscience
              2007 Mikrosystemtechnik Kongress 2007, Dresden, Germany , Seiten: 739 - 742
            • S. Brugger, W. Pfleging, O. Paul
              Novel Fabrication Process for the Integration of MEMS Devices With Thick Amorphous Soft Magnetic Field Concentrators
              2007 Materials Resarch Society Symposium 2007, Boston, USA , Band: 1052, Nummer: DD07, Ergänzungsband: 11
            • J. Gaspar, M. Schmidt, J. Held, O. Paul
              Reliability of MEMS Materials: Mechanical Characterization of Thin-Films Using the Wafer Scale Bulge Test and Improved Microtensile Techniques
              2007 Material Research Society Symposium 2007, Boston, USA , Band: 1052, Nummer: DD01, Ergänzungsband: 02
            • M. Cornils, O. Paul
              Sensor Calibration of Planar Four-Contact Devices With up to Two Extended Contacts
              2007 Mikrosystemtechnik Kongress 2007, Dresden, Germany , Seiten: 893 - 896
            • M. Cornils, O. Paul
              Sensor Calibration of Planar Four-Contact Devices With up to Two Extended Contacts
              2007 IEEE Sensors 2007, Atlanta, USA , Seiten: 1259 - 1262
            • P. Gieschke, J. Held, M. Dölle, J. Bartholomeyczik, P. Ruther, O. Paul
              Smart Brush Based on a High Density CMOS Stress Sensor Array and SU-8 Microposts
              2007 IEEE MEMS Conference 2007, Kobe, Japan , Seiten: 631 - 634
            • J. Held, J. Gaspar, P. Ruther, M. Hagner, A Cismak, A. Heilmann, O. Paul
              Systematic Characterization of DRIE-Based Fabrication Process of Silicon Microneedles
              2007 Material Research Society Symposium, Boston, USA , Band: 1052, Nummer: DD07, Ergänzungsband: 07
            • P. Gieschke, B. Levey, M. Dölle, A. Trautmann, P. Ruther, O. Paul
              Tactile CMOS-Integrated 3D Force Sensor System
              2007 Mkrosystemtechnik Kongress 2007, Dresden, Germany , Seiten: 759 - 762
            • H.P. Neves, P. Ruther
              The NeuroProbes Project
              2007 Int. Conf. of the IEEE EMBS, Lyon, France , Seiten: 6442 - 6444

            2006

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            • A. Trautmann, F. Heuck, R. Denfeld, P. Ruther, O. Paul
              Detachable Silicon Microneedle Stampus for Allergy Skin Prick Testing
              2006 IEEE MEMS 2006 Conference, Istanbul, Turkey , Seiten: 434 - 437
            • S. Spinner, J. Bartholomeyczik, B. Becker, M. Dölle, O. Paul
              Electromechanical Reliability Testing of Three-Axial Silicon Force Sensors
              2006 DTIP of MEMS & MOEMS, Stresa, Italy , Seiten: 77 - 82
            • U. Bartsch, A. Trautmann, O. Paul, P. Ruther
              Elektromechanischer Energiewandler basierend auf SOI-Technologie
              2006 4. GMM Workshop Energieautarke Sensorik, Karlsruhe, Germany , Seiten: 99 - 102
            • S. Brugger, P. Simon, O. Paul
              Field Concentrator Based Resonant Magnetic Sensor
              2006 IEEE Sensors 2006, EXCO, Deagu, Korea , Seiten: 1016 - 1019
            • J. Yang, O. Paul
              Fracture Properties of Thermal Silicon Oxide Thin Films from the Load-Deflection of Long SiNx/SiO2 Membranes
              2006 IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems, Zhuhai, China , Seiten: 1362 - 1367
            • P. Ruther, J. Barholomeyczik, S. Kibbel, T. Schelb, P. Gieschke, O. Paul
              Integrated CMOS-Based Sensor Array for Mechanical Stress Mapping
              2006 IEEE Sensors 2006, EXCO, Deagu, Korea , Seiten: 1131 - 1134
            • J. Bartholomeyczik, J. Häfner, B. Lapatki, R. Ruther, T. Schelb, O. Paul
              Integrated Six-Degree-of-Freedom Sensing for Orthodontic Smart Brackets
              2006 IEEE MEMS 2006 Conference, Istanbul, Turkey , Seiten: 690 - 693
            • P. Ruther, M. Dölle, J. Bartholomeyczik, P. Gieschke, O. Paul
              Integrierte Stresssensorik: Neue Techniken und Systeme
              2006 ITG/GMA-Fachtagung Sensoren und Messsysteme, Freiburg, Germany , Seiten: 60 - 64
            • S. Spinner, J. Bartholomeyczik, B. Becker, M. Dölle, O. Paul, I. Polian, R. Roth, K. Seitz, P. Ruther
              Reliability Testing of Three-Dimensional Silicon Force Sensors
              2006 18th ITG/GMM-Workshop Testmethoden und Zuverlässigkeit von Schaltungen und Systemen, Titisee-Neustadt, Germany , Seiten: 111 - 112
            • M. Dölle, J. Held, P. Ruther, O. Paul
              Simultaneous and Independent Measurement of Stress and Temperature Using a Single Field Effect Transistor Based Sensor
              2006 IEEE MEMS 2006 Conference, Istanbul, Turkey , Seiten: 150 - 153
            • J. Gaspar, P. Ruther, O. Paul
              Strength of LPCVD Silicon Nitride Thin Films
              2006 3rd Int. Conf. on Multiscale Materials Modeling 2006, Freiburg, Germany , Seiten: 966 - 969
            • O. Paul, M. Dölle, J. Held, P. Ruther
              Unabhängige Stress- und Temperaturmessung mit Feldeffekt-Transistoren
              2006 ITG/GMA-Fachtagung Sensoren und Messsysteme, Freiburg, Germany , Seiten: 139 - 144

            2005

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            • O. Paul, P. Ruther, J. Bartholomeyczik, M. Dölle
              CMOS MEMS - A Critical Review
              2005 Micromechanics Europe Workshop MME 2005, Göteborg, Sweden , Seiten: 24 - 31
            • J. Bartholomeyczik, S. Kibbel, P. Ruther, O. Paul
              Extraction of Compensated Sxx-Syy and Sxy Stresses from a Single Four-Contact
              2005 IEEE MEMS 2005 Conference, Miami Beach, USA , Seiten: 267 - 270
            • M. Dölle, D. Mager, P. Ruther, O. Paul
              Geometry Dependent Sensitivity of Piezoresistive Stress Sensors Based on the Pseudo-Hall-Effect
              2005 IEEE MEMS 2005 Conference, Miami Beach, USA , Seiten: 236 - 266
            • J. Bartholomeyczik, P. Ruther, O. Paul
              Novel Cartesian Lattice Spinning Method for the Simple Extraction of Sxx-Syy and Sxy Stresses and the Hall Voltage From Four-Contact Elements
              2005 Transducers 05 Conference, Seoul, Korea , Seiten: 2127 - 2130
            • M. Dölle, P. Ruther, O. Paul
              Novel Highly Miniaturized Multi-Stress Sensor Based on Field Effect Transducers With Eight Source/Drain Terminals
              2005 Transducers 05 Conference, Seoul, Korea , Seiten: 321 - 324
            • A. Trautmann, P. Ruther, O. Paul
              Replication of Microneedle Arrays Using Vacuum Casting and Hot Embossing
              2005 Transducers 05 Conference, Seoul, Korea , Seiten: 1420 - 1423
            • A. Trautmann, F. Heuck, C. Müller, P. Ruther, O. Paul
              Replication of Microneedle Arrays Using Vacuum Casting and Hot Embossing
              2005 Mikrosystemtechnik Kongress 2005, Freiburg, Germany VDI-VDE-IT

            2004

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            • P. Ruther, M. Herrscher, O. Paul
              A Micro Defferential Thermal Analysis (uDTA) System
              2004 IEEE MEMS 2004 Conference, Maastricht, Holland , Seiten: 165 - 168
            • M. Schuster, N. Klein, P. Ruther, A. Trautmann, O. Paul, P. Kuzel, F. Kadlec
              An Interconnected 2D-TM EBG Structure for Millimetr and Sub-Millimetre Waves
              2004 Int. Symp. on Photonic and Electromagnetic Crystal Structures V
            • S. Kamiya, J. Kuypers, A. Trautmann, P. Ruther, O. Paul
              Annealing Temperature Dependent Strength of Polysilicon Measured Using a Novel Tensile Test Structure
              2004 IEEE MEMS 2004 Conference, Maastricht, Holland , Seiten: 185 - 188
            • A. Trautmann, P. Ruther, W. Baumann, M. Lehmann, O. Paul
              Fabrication of Out-of-Plane Electrodes for Intracellular Potential Measurements on Living Adherent Cells
              2004 SEMEA-Meeting 2004, Tübingen, Germany , Seiten: 79 - 79
            • S. Armbruster, F. Schäfer, G. Lammel, J. Brasas, C. Schelling, S. Finkbeiner, M. Illing, P. Ruther, O. Paul
              Surface Micromachining of Monocrystalline Silicon Membranes Using a Silicon Micro Grid on Sintered Porous Silicon
              2004 Eurosensors XVIII Conference, Rome, Italy , Seiten: 22 - 23
            • A. Trautmann, P. Ruther, W. Baumann, M. Lehmann, O. Paul
              Three-Dimensional Nanoelectrodes for Biomedical Investigations on Living Cell Networks
              2004 Eirpsemsprs XVIII Conference, Rome, Italy , Seiten: 140 - 141
            • M. Dölle, C. Peters, P. Gieschke, P. Ruther, O. Paul
              Two-Dimensional High Density Piezo-FET Stress Sensor Arrays for In-Situ Monitoring of Wire Bonding Processes
              2004 IEEE MEMS 2004 Conference, Maastricht, Holland , Seiten: 829 - 832

            2003

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            • S. Armbruster, F. Schäfer, G. Lammel, H. Artmann, C. Schelling, H. Benzel, S. Finkbeiner, F. Lärmer, P. Ruther, O. Paul
              A Novel Micromachining Process for the Fabrication of Monocrystalline Si-Membranes Using Porous Silicon
              2003 Transducers 2003, Boston, USA , Seiten: 246 - 249
            • P. Ruther, J. Bartholomeyczik, A. Buhmann, O. Paul
              Characterization of Microelectromechanical HF Resonators Fabricated Using a SOI-Based Low Temperature Process
              2003 IEEE Sensors 2003 Conference, Toronto, Canada , Seiten: 820 - 824
            • P. Ruther, M. Ehmann, T. Lindemann, O. Paul
              Dependence of the Temperature Distribution in Micro Hotplates on Heater Geometry and Heating Mode
              2003 Transducers 2003, Boston, USA , Seiten: 73 - 76
            • T. Kramer, O. Paul
              Mechanical Properties of Compressively Prestressed Thin Films Extracted From Pressure Dependent Ripple Profiles of Long Membranes
              2003 IEEE MEMS 2003 Conference, Kyoto, Japan , Seiten: 678 - 681
            • U. Wagner, R. Müller-Fiedler, J. Bagdahn, B. Michel, O. Paul
              Mechanical Reliability of Epipoly MEMS Structures Under Shock Load
              2003 Transducers 2003 Conference, Boston, USA , Seiten: 175 - 178
            • A. Trautmann, P. Ruther, O. Paul
              Microneedle Arrays Fabricated Using Suspended Etch Mask Technology Combined With Fluidic Through Wafer Vias
              2003 IEEE MEMS 2003 Conference, Kyoto, Japan , Seiten: 682 - 685
            • J. Bartholomeyczik, P. Ruther, A. Buhmann, K. Steffen, O. Paul
              Novel Low Temperature SOI-Based Fabrication Process for High Frequency Micromechanical Resonators
              2003 Eurosensors XVII, Guimaraes, Portugal , Seiten: 779 - 782
            • M. Dölle, P. Ruther, O. Paul
              Novel Stress Sensors Based on the Pseudo-Hall Response of MOSFETs
              2003 IEEE MEMS 2003 Conference, Kyoto, Japan , Seiten: 490 - 493
            • U. Wagner, W. Bernhard, R. Müller-Fiedler, B. Michel, O. Paul
              Reliability of Micromachined Membranes Under Particle Impact
              2003 Transducers 2003 Conference, Boston, USA , Seiten: 436 - 439
            • A. Trautmann, R. Haug, P. Ruther, O. Paul
              Robustness of Silicon Microneedle Arrays Penetrating Into Bulk Materials
              2003 Eurosensors XVII, Guimaraes, Portugal , Seiten: 414 - 417
            • M. Dölle, P. Ruther, O. Paul
              Shear Stress Sensitive Piezo-FET Stress Sensors With Offset Reduction of Nonmechanical Contributions
              2003 Eurosensors XVII 2003, Guimaraes, Portugal , Seiten: 189 - 192
            • P. Ruther, K. Colelli, H.-P. Frerichs, O. Paul
              Surface Conductivity of a CMOS Silicon Nitride Layer
              2003 IEEE Sensors 2003 Conference, Toronto, Canada , Seiten: 990 - 995
            • O. Paul, T. Kramer
              Symmetry Transitions of Compressively Prestressed Long Membranes Under Pressure
              2003 Transducers 2003 Conference, Boston, USA , Seiten: 432 - 435
            • O. Paul, P. Ruther
              Testing the Limits of Silicon Technology Based MEMS Materials
              2003 Intl. Symposium on Micromechanics and Human Science 2003, Nagoya, Japan , Seiten: 1 - 9

            2002

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            • P. Ruther, U. Schiller, W. Büsser, R. Janke, O. Paul
              Influence of the Junction Field Effect on the Offset Voltage of Integrated Hall Plate
              2002 Eurosensors XVI 2002 Conference, Prague, Czech Republic , Seiten: 1209 - 1212
            • A. Trautmann, P. Ruther, O. Paul
              Novel Microneedle Arrays Fabricated Using Suspended Etch Masks
              2002 Eurosensors XVI 2002 Conference, Prague, Czech Republic , Seiten: 433 - 436
            • M. Ehmann, T. Lindemann, P. Ruther, O. Paul
              Temperature Distribution in Micro Hotplates
              2002 MME 2002 Workshop, Sinaia, Romania , Seiten: 307 - 310
            • M. Ehmann, P. Ruther, F. Schubert, O. Paul
              Thermally Activated Aging of Polysilicon
              2002 IEEE Sensors 2002 Conference, Orlando, USA , Seiten: 602 - 606
            • P. Ruther, W. Büsser, R. Janke, U. Schiller, O. Paul
              Thermomagnetic Residual Offset in Integrated Hall Plates
              2002 IEEE Sensors 2002 Conference, Orlando, USA , Seiten: 763 - 766

            2001

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            • A. Schaufenbühl, N. Schneeberger, U. Münch, M. Wälti, O. Paul, O. Brand, H. Baltes, C. Menolfi, Q. Huang, E. Döring, M. Löpfe
              256-Pixel CMOS-Integrated Thermoelectric Infrared Sensor Array
              2001 IEEE MEMS 2001 Conference, Interlaken, Switzerland , Seiten: 200 - 203
            • M. Ehmann, P. Ruther, M. von Arx, H. Baltes, O. Paul
              Aging Behavior of Polysilicon Heaters for CMOS Microstructures Operated at Temperatures up to 1200 K
              2001 IEEE MEMS 2001 Conference, Interlaken, Switzerland , Seiten: 147 - 150
            • J. Yang, C. Peters, O. Paul
              Fracture Properties of LPCVD Silicon Nitride Thin Films from the Load-Deflection of Long Membranes
              2001 Transducers 2001 Conference, Munich, Germany , Seiten: 1394 - 1397
            • W. Menz, O. Paul, J. Rühe, H. Zappe
              Material Considerations for Micromachine Technology
              2001 Int. Symposia on Materials Science for the 21st Century, Osaka, Japan The Society of Materials Science, Japan, Band: A, Seiten: 112 - 123
            • U. Wagner, J. Franz, M. Schweiker, W. Bernhard, R. Müller-Fiedler, B. Michel, O. Paul
              Mechanical Reliability of MEMS-Structures Under Shock Load
              2001 12th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, Bordeaux, France , Seiten: 1657 - 1662
            • T. Kramer, T. Brenner, O. Paul
              Postbuckled Micromachined Square Membranes under Differential Pressure
              2001 Micromachining Europe MME 2001, Cork, Ireland , Seiten: 289 - 292
            • S. Hafizovic, O. Paul
              Temperature Dependent Thermal Conductivities of CMOS Layers by Micromachined Thermal van der Pauw Test Structures
              2001 Transducers 2001 Conference, Munich, Germany , Seiten: 1398 - 1401

            2000

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            • P. Ruther, M. Burg, C. Steinert, O. Paul
              Humidity Micro Sensors Using Silica Aerogel Thin Films
              2000 Eurosensors XIV Conference, Copenhagen, Denmark , Seiten: 79 - 82
            • M. Ehmann, P. Ruther, O. Paul
              Operation and Aging of Polysilicon-Heated Microstructures at Temperatures up to 1100 K
              2000 Micromachining Europe MME 2000, Uppsala, Sweden
            • T. Kramer, O. Paul
              Surface Micromachined Ring Test Structures to Determine Mechanical Properties of Compressive CMOS IC Thin Films
              2000 Eurosensors XIV 2000 Conference, Copenhagen, Denmark , Seiten: 25 - 28

            1999

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            • O. Paul, L. Plattner, H. Baltes
              A Thermal van der Pauw Test Structure
              1999 IEEE ICMTS 99, Gothenberg, Sweden , Seiten: 56 - 61
            • V. Ziebart, O. Paul, H. Baltes
              Extraction of the Coefficient of Thermal Expansion of Thin Films From Buckled Membranes
              1999 MRS Fall Meeting, Boston, USA , Seiten: 103 - 108
            • L. Plattner, M. Mayer, Ch. Lüchinger, O. Paul, H. Baltes
              In-Situ Measurement of Chip Temperature During Soft Solder Die Bonding Using Integrated Microsensors
              1999 IMAPS99, Chicago, USA , Seiten: 213 - 220
            • M. Mayer, J. Schwizer, O. Paul, H. Baltes
              In-Situ Ultrasonic Stress Measurements During Ball Bonding Using Integrated Piezoresistive Microsensors
              1999 Interpack 99, Maui, USA , Seiten: 973 - 978
            • M. Mayer, O. Paul, D. Bolliger, H. Baltes
              Integrated Temperature Microsensors for Characterization and Optimization of Thermosonic Ball Bonding Process
              1999 IEEE ICTC 99, San Diego, USA , Seiten: 463 - 468
            • N. Schneeberger, O. Paul, H. Baltes
              Spectral infrared absoprtion of CMOS thin film stacks
              1999 IEEE MEMS 1999, Orlando, USA , Seiten: 106 - 110
            • U. Münch, H. Baltes, O. Paul, E. Doering
              Stress analysis of standard CMOS process
              1999 SPIE 1999, Gold Coast, Australia , Seiten: 344 - 351
            • J. Schwizer, M. Mayer, O. Paul, D. Bolliger, H. Baltes
              Thermosonic Ball Bonding: Friction Model Based on Integrated Microsensor Measurements
              1999 25th IEEE/CPMT IEMT Symposium, Austin, USA , Seiten: 108 - 114
            • A. Schaufelbuehl, N. Schneeberger, U. Muench, O. Paul, H. Baltes, C. Menolfi, Q. Huang
              Uncooled Low-Cost Thermal Imager Using Micromachined CMOS Integrated Sensor Array
              1999 Transducers 1999, Sendai, Japan , Seiten: 606 - 609

            1998

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            • H. Baltes, O. Brand, O. Paul
              CMOS MEMS technology and CAD: the case of thermal microtransducers
              1998 SPIE 1998 Symposium on Smart Structures and Materials, San Diego, USA , Band: 3328, Seiten: 2 - 12
            • S. Koller, V. Ziebart, O. Paul, O. Brand, H. Baltes, P.M. Sarro, M.J. Vellekoop
              Determination of mechanical material properties of piezoelectric ZnO films
              1998 SPIE 1998 Symposium on Smart Structures and Materials, San Diego, USA , Band: 3328, Seiten: 102 - 109
            • F. Mayer, G. Ofner, O. Paul, H. Baltes
              Flip-chip packaging for smart MEMS
              1998 SPIE 1998 Symposium on Smart Structures and Materials, San Diego, USA , Band: 3328, Seiten: 183 - 193
            • M. Mayer, O. Paul, D. Bolliger, H. Baltes
              In-Situ Calibration of Wire Bonder Ultrasonic System Using Integrated Microsensor
              1998 EPTC 98, Singapore , Seiten: 21- - 223
            • M. Mayer, O. Paul, H. Baltes
              In-situ measurement of temperature and stress under bonding pads during bonding using integrated microsensors
              1998 EMIT '98, Bangalore, India , Seiten: 129 - 133
            • M. Waelti, N. Schneeberger, O. Paul, H. Baltes
              Low Temperature Packaging of CMOS Infrared Microsystems by Si-Al-Au Bonding
              1998 Annual Symposium Elekctrochem. Soc. 1998, Paris, France , Seiten: 147 - 154
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