Projects
Thin-film characterization
Project description
We analyse the mechanical behaviour of dielectric thin-film materials used in MEMS and CMOS technologies applying a wafer-level bulge test.
Start/End of project
01.08.2006 until 31.07.2007
Project manager
Prof. Dr. Oliver Paul
Contact person
Prof. Dr. Oliver Paul
Phone:+49 761 203 7191
Email:paul@imtek.de
Funding
infineon Technologies AG