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Microcoils
Magnetic Microsystems, Harvester
Adaptive Lens
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Prof. Wallrabe
Angelina Müller, Dr.-Ing.
Open positions
Personal pages
Dr. Matthias Wapler
Prof. Dr.-Ing. Ulrike Wallrabe
Hitesh Gowda
Research
Magnetic microsystems
The major technological challenges in the field of magnetic microsystems are the processes and materials. The Laboratory for Microactuators runs a unique, fast ...
MEMS fabrication processes
In the Microactuators lab, we have developed know-how in various fabrication processes, which extend beyond classical MEMS fabrication techniques. We combine ...
Adaptive optics
In the Laboratory for Microactuators, we approach adaptive optics from the point of view of the actuation, of course together with the optical performance and ...
Piezo actuators
Piezo actuation is a core technology that we integrate in our adaptive optical elements, for example because of the short response time and low power ...
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