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7575 Micro-optics Technical staff 102-02-077 Abdelgawad, Louay Systems Control and Optimization Student assistants Abdelgawad, Dr.-Ing. Ghada Hamdy Ibrahim 67548 Fritz Huettinger Chair of Microelectronics Postdocs 102-02-217 Aftab, M. Sc. Taimur 7183 Electrical Instrumentation PhD students 106-04-005 Aghaei, Dr. Mohammadreza 7213 Electrical Instrumentation Visiting researchers 106-04-006 Agnihotri, B. E. Shashank 7405 Nanotechnology Student assistants 103-01-097 Aguirre Salgado, M.Sc. Debora Marcela 0761-154339-0 Biomedical Microtechnology PhD students Akhtar, Saniea Electrical Instrumentation Student assistants 106-04-004 7531 Bio- and Nanophotonics PhD students 102-01-088b 98591 Biomedical Microtechnology Scientific staff 102-00-079 7451 Biomedical Microtechnology Postdocs 102-00-077 Amayreh, M. Sc. Mohammad 7589 Fritz Huettinger Chair of Microelectronics Scientific staff 102-03-032 0761 5159-410 Compound Semiconductor Microsystems Director Appel, Dr. Nicole 73206 MEMS Applications Administration Engesserstr. 4 Aqrawe, Dr. Zaid 7453 Biomedical Microtechnology Visiting researchers 102-00-208 Anbau Araya Martinez, Jose Moises Electrical Instrumentation Student assistants Arjmand, Ehsan Mahmodi MEMS Applications Student assistants Arnold, Harald 0761 203 7055 Clean Room Service Center Technical staff 104 02 017 Arshad, Muhammed Omer Sensors Student assistants 98590 Biomedical Microtechnology Scientific staff 071-00-03.4 Asiaee Sahneh, Sarareh Alsadat +49 (0) 761 203-67464 Chemistry and Physics of Interfaces PhD students 102-00-208 Asplund, Dr. Maria 67375 Biomedical Microtechnology Group leaders 102-00-083 7572 Micro-optics Group leaders 102-02-075 Ates, Hatice Ceren 95123 Sensors Scientific staff FIT 01-039 Ayaz, B.Sc. Fazeel Assembly and Packaging Technology Student assistants 7194 Microsystem Materials PhD students 103-00-088a Name Phone number Chair Function Email Office
Bacher, Matthias Florian Sensors Student assistants Baghai Arassi, Maral Chemistry and Physics of Interfaces External PhD students Bagherian, Dr. Zahra 54065 MEMS Applications Postdocs 103-01 (Anbau) Bahrami, Maryam +49 761 (0) 203-95157 Chemistry and Physics of Interfaces PhD students 105-02-039 Baliozian, M. Sc. Puzant +49 761 4588-5383 Thin-film Gas Sensors External PhD students Banda, Suresh Reddy +49 (0) 761 203-8139 Chemistry and Physics of Interfaces PhD students 103 00 101 Banerjee, M.Sc. Kaustubh 7518 Micro-optics PhD students 102-02-079 Barth, Oliver 73282 MEMS Applications Technical staff 104 02 Bashiti, B.Sc. Ahmad Assembly and Packaging Technology Master students Baslan, B.Sc. Yara Biomedical Microtechnology Master students Bauer, Dipl.-Ing. (FH) Martin 7063 Clean Room Service Center Technical staff 104-02-017 Bauersfeld, Dr. Marie-Luise +49 761 8857-290 Thin-film Gas Sensors Visiting researchers Baumann, Melanie 73211 MEMS Applications Administration 103-01 (Anbau) Baumer, Hans -7236 Department of Microsystems Engineering Technical staff Baumgartner, Dr. Desirée 98724 MEMS Applications Scientific staff 103-01 (Anbau) Baumgärtner, Kathrin Systems Control and Optimization Student assistants Baur, Armin 7054 Clean Room Service Center Technical staff 104-02-017 Bean, Dr. Jessica +49 (0) 761 203-7407 Chemistry and Physics of Interfaces Postdocs 102-00-208 Becherer, Lisa 73227 MEMS Applications PhD students 103-01 (Anbau) 7397 Process Technology Scientific staff 103 02 098 95126 Mechanical Mirco-Production Service Center Scientific staff 105-02-026 Behrmann, Ole 7267 Sensors PhD students 103-01-095 54059 MEMS Applications Postdocs 105 00 036 Beltran Ramirez, Kevin Ali Sensors Student assistants 103-01-069 98589 Biomedical Microtechnology Scientific staff 071-00-03.4 7195 Microsystem Materials PhD students 103-00-092 7269 Sensors Group leaders 103-01-096 Bernhardsgrütter, M. Sc. Ralf Emanuel +41 (0)71 992 02 33 Thin-film Gas Sensors External PhD students Bhat Kashekodi, M.Sc. Anjan 7498 Design of Microsystems Scientific staff 102-01-077 Bhattacharyya, M. Sc. Mayukh Electrical Instrumentation External PhD students Bierer, Dr. Benedikt +49 761 8857-263 Thin-film Gas Sensors Visiting researchers Bilger, Thomas 67494 Design of Microsystems Technical staff 102-01-213 73237 MEMS Applications Technical staff 103-02-099 Birkle, Alexander 7051 Department of Microsystems Engineering Service 104-02-005 Birkle, Markus 7060 MEMS Applications Administration 103-01 (Anbau) Birsner, Nicole +49 761 (0) 203-7376 Chemistry and Physics of Interfaces PhD students 102-00-208 Bleck, M.Sc. Lena Biomedical Microtechnology External PhD students Bleitner, M. Sc. Alexander 67545 Fritz Huettinger Chair of Microelectronics Scientific staff 102-02-211 Bodewig, Tobias Electrical Instrumentation Bachelor students Bohn, Luca MEMS Applications Student assistants 7235 Electrical Instrumentation Technical staff 106-03-006 8524 Electrical Instrumentation Scientific staff 071-00-012 Boretius, Dr.-Ing. Tim 0761-154339-0 Biomedical Microtechnology Visiting researchers 73208 MEMS Applications Group leaders 103-01 (Anbau) Boschert, David Polymer Synthesis and Surface Engineering Group PhD students Botschek, Beate 7212 Electrical Instrumentation Secretary 106-04-014 +49 (0) 761 203-7163 Chemistry and Physics of Interfaces Group leaders 103-00-105 Braun, Tobias 73271 MEMS Applications IT 103 02 105 54025 MEMS Applications PhD students 103 01 54063 MEMS Applications Group leaders 103 00 (Anbau) 7455 Optical Systems Group leaders 102-00-089 Bronnenmeyer, Thilo Systems Control and Optimization Student assistants Bruch, Richard Sensors PhD students 103-01-092 Brunauer, Anna 73230 MEMS Applications PhD students 103-01(Anbau) 7408 Microactuators PhD students 102 02 081 7213 Electrical Instrumentation Group leaders 010 Bukreus, Leonie Electrical Instrumentation Student assistants Buraj, Klajdi Sensors Master students 101-01-096 Burger, Dr. Stefan 73259 MEMS Applications Postdocs 103-01 (Anbau) Burzlaff, Uwe 203-7149 Department of Microsystems Engineering Technical staff 0761 8857-111 Optical Systems Director Busulwa, Titus Systems Control and Optimization Student assistants Butz, M. Sc. Natalie 67546 Fritz Huettinger Chair of Microelectronics Scientific staff 102-02-211 67677 Design of Microsystems PhD students 102-01-077 Böhler, Dr. Christian 67375 Biomedical Microtechnology Postdocs 102-00-083 Bühler, Melanie 54061 MEMS Applications PhD students 105 00 036 Bürger, B. Sc. Jasmin-Clara 7187 Nanotechnology Master students 103 01 097 Bürger, Adrian Systems Control and Optimization PhD students Bürkin, Elena 7013 Sensors Student assistants 104-00-013 Name Phone number Chair Function Email Office
73204 MEMS Applications Postdocs 103 01 (Anbau) Caspari, Patrick Systems Control and Optimization Student assistants Chen, Wei +49 (0) 761 203-67465 Chemistry and Physics of Interfaces PhD students 102-00-208 Christ, Dr. Elliot +49 (0)761 203-7168 Chemistry and Physics of Interfaces Postdocs 103-00-101 Codrignani, Dr. Andrea 67726 Simulation Postdocs 103-03-020 Comella, M.Sc. Laura Maria 7497 Design of Microsystems Group leaders 102-01-217 Conrad, Stefan MEMS Applications Master students Cota Monjarás, M.Sc. Oscar Fernando 0761-154339-0 Biomedical Microtechnology PhD students Cruz, M.Sc. Maria 54041 Biomedical Microtechnology Scientific staff 102-00-208 Cruz-Ortiz, Edgar MEMS Applications Student assistants 7519 Micro-optics Group leaders 102-02-079 Cuignet, M. Sc. Xavier 67563 Fritz Huettinger Chair of Microelectronics Scientific staff 102-02-217 67635 Biomedical Microtechnology Scientific staff 102-00-79 7208 Microsystem Materials Bachelor students 103-00-069 Name Phone number Chair Function Email Office
Dame, Dr. Gregory 7267 Sensors Visiting researchers 103-01-095 Dammann, Raphael MEMS Applications Student assistants Danzeisen , Anja MEMS Applications Student assistants Dbouk, M.Sc. Ahmad Biomedical Microtechnology Student assistants De Dorigo, Dipl.-Ing. Daniel 7595 Fritz Huettinger Chair of Microelectronics Scientific staff 102-03-029 De Schutter, Jochem Systems Control and Optimization Scientific staff 01 215 Deggelmann, Lukas Process Technology Student assistants Deng, Zhuoling Polymer Synthesis and Surface Engineering Group PhD students Deschner, Alicia MEMS Applications Interns Diaz Osorio, B.Sc. Juan Micro-optics Master students Diehl, Prof. Dr. Moritz 67852 Systems Control and Optimization Director 102-01-206 Dietz, Alexander +49 (0) 761 203-7182 Chemistry and Physics of Interfaces Technical staff 103-00-026 Dinakaran, Deepak 7225 Optoelectronics Master students 103-01-034 Dinc, B. Sc. Mahmut Cem +49 761 203-96808 Thin-film Gas Sensors Master students 102-00-086 Dincer, Bilge Nur 7260 Sensors Secretary 103-01-088 7264 Sensors Group leaders 103-01-092 Dintcheva-Atanasova, M.A. Tania 7290 Assembly and Packaging Technology Secretary 103 01 027 Dintcheva-Atanasova, Tania 7593 Fritz Huettinger Chair of Microelectronics Secretary 102-03-025 Doan, Minh Dang Systems Control and Optimization Postdocs Doench, Ingo Bio- and Nanophotonics Technical staff Dold, Martin Systems Control and Optimization Student assistants +49 781 2054 607 Electrical Instrumentation External PhD students Dongyang, Cai 7276 Sensors PhD students 103-01-070 73293 MEMS Applications Group leaders 103-01 (Anbau) Dorn, B.Sc. Alex Micro-optics Master students Dorner, Franziska 203-7454 Chemistry and Physics of Interfaces PhD students 102-00-208 Dornhof, Johannes 7277 Sensors PhD students 103-01-071 73264 MEMS Applications Postdocs Engesserstr. 4 Drost, Johannes Marvin MEMS Applications Student assistants Duo, M.Sc. Silvia Biomedical Microtechnology Visiting researchers 4771 Sensors Postdocs FMF-03-028 Name Phone number Chair Function Email Office
Eger, Carmen +49 (0) 761 203-7167 Chemistry and Physics of Interfaces PhD students 103-00-040 7524 Biomicrotechnology Director 102-01-082 Ehlert, Alina Biomedical Microtechnology Bachelor students 102-00-060 67636 Biomedical Microtechnology Group leaders 102-00-079 Einwächter, Simon 4759 Sensors External PhD students FMF-02-031 Eisenkolb, Sarah 7264 Sensors Student assistants 103-01-092 El Gendy, Ahmed MEMS Applications Student assistants Engesserstr.4, 1. OG El-Sayed, M.Sc. Sarah 67478 Simulation Visiting researchers 103-03-029 Elamin, M.Sc. Muhand Fadlalla 7102 Nanotechnology Master students 105 01 055 Elflein, Lukas 67478 Simulation Student assistants 03029 Elsaegh, M. Sc. Samar 67548 Fritz Huettinger Chair of Microelectronics Scientific staff 102-02-217 Elsaegh, M.Sc. Samar 67548 Micro-optics External PhD students 102-02-211 Enderle, Dr. Barbara 7266 Sensors Technical staff 103-01-094 Engel, M.Sc. Laura +49 761 8857-245 Thin-film Gas Sensors PhD students Engesser, Florian 7269 Sensors Scientific staff 103-01-096 Erath, Roman Polymer Synthesis and Surface Engineering Group PhD students Erd, Dipl.-Ing. mult., Dipl.-Inf. Metin Electrical Instrumentation External PhD students 7548 Bio- and Nanophotonics Technical staff 102-01-026 Erhard, Dr. Michael Systems Control and Optimization Scientific staff 7430 Biomedical Microtechnology Scientific staff 071-00-03.4 Ernestus, Maximilian Systems Control and Optimization Student assistants Ersoez, M. Sc. Bora +65 6 571-2702 Thin-film Gas Sensors External PhD students Name Phone number Chair Function Email Office
Farahani, Hamid 4771 Sensors PhD students FMF-03-028 Farina, Monika Assembly and Packaging Technology Student assistants 7359 Process Technology Visiting researchers 103-02-095 Fechtig, Michael MEMS Applications Master students 103-02-107 Feix, Nicholas Systems Control and Optimization Student assistants 7318 Assembly and Packaging Technology Scientific staff 103 01 026 Fellinger, Olivia +49 (0) 761 203-7160 Chemistry and Physics of Interfaces Secretary 103-00-107 Feng, B.Eng. Qingming Assembly and Packaging Technology Master students Fertmann, Daniel Electrical Instrumentation Student assistants +49 781 205-178 Electrical Instrumentation External PhD students Findling, Louis Systems Control and Optimization Student assistants Fischer, Jörg 0761 203 98564 Systems Control and Optimization Postdocs 01 215 Florea, Dr. Mara +49 (0) 761 203-67463 Chemistry and Physics of Interfaces Postdocs 102-00-208 Folwill, M.Sc. Yannick 7574 Micro-optics PhD students 102-02-077 Fontaine, Sarah +49 (0) 761 203-7375 Chemistry and Physics of Interfaces PhD students 102-00-208 203-7182 Chemistry and Physics of Interfaces PhD students 103-00-026 Frank, Sascha 97785 Simulation IT 103-03-027 Frey, Holger +49 (0) 761 203-7181 Chemistry and Physics of Interfaces Technical staff 103-00-026 Frey, Dipl.-Chem. Marco 0761-203-7553 Materials Processing Technology Group leaders 102-02-089 Frey, Yasmina Microactuators Student assistants Frey, Jonathan Systems Control and Optimization Student assistants Frison, Dr. Gianluca Systems Control and Optimization Postdocs 73209 MEMS Applications Group leaders 103-01 (Anbau) Name Phone number Chair Function Email Office
+49 761 4588-5468 Electrical Instrumentation External PhD students Ganzmann, Sophie Microsystem Materials Bachelor students Gao, Dr. rer. nat. Haitao +49 761 203-97632 Thin-film Gas Sensors Scientific staff 102-00-085 Gartner, Viola 7593 Fritz Huettinger Chair of Microelectronics Secretary 102-03-025 +49 7803 9698-4469 Electrical Instrumentation External PhD students 7373, 7043 Process Technology Technical staff 103-02-094 7373, 7043 Mechanical Mirco-Production Service Center Technical staff 103-02-094 Gehrmann, Dipl.-Ing. (FH) Stephan +49 711 91184673 Electrical Instrumentation External PhD students Gepperth, Nicola 73235 MEMS Applications Marketing 103-02-204 (Anbau) Gerdes, Björn 73265 MEMS Applications PhD students 103-02-107 Gerhards, Franziska Systems Control and Optimization Student assistants Ghanam, Dipl.-Ing. Muhannad 7400 Design of Microsystems Scientific staff 102-01-213 7188 Electrical Instrumentation Postdocs 106-04-005 Gierke, Simon Sensors Bachelor students Girrbach, Fabian 98564 Systems Control and Optimization PhD students 01 209 Gkogkidis, Dipl.-Biologe Alexis Biomedical Microtechnology External PhD students Glatz, Regina 7264 Sensors Student assistants 103-01-092 Gmoser, Helena 7268 Sensors Bachelor students 103-01-095 Godbole, Ira MEMS Applications Student assistants Goeppert, Dipl.-Ing. Jacob 67552 Fritz Huettinger Chair of Microelectronics Scientific staff 102-02-213 Gola, Dr. Adrien Simulation Postdocs Goldschmidtböing, Dr. Frank 7496 Design of Microsystems Group leaders 102-01-217 González-Cerdas, M.Sc. Gerardo 7573 Micro-optics PhD students 102-02-075 +49 781 205-302 Electrical Instrumentation External PhD students Goralczyk, Andreas Process Technology PhD students 7233 Electrical Instrumentation External PhD students 071-00-015 7435 Microactuators PhD students 102 02 081 Graf, M. Sc. Dennis 7556 Materials Processing Technology PhD students 102-02-088b Greiner, Dr. Andreas 67479 Simulation Group leaders 103-03-022 7189 Electrical Instrumentation Scientific staff 071-00-015 Griesser, M.Sc. Jan 97785 Simulation PhD students 103-03-027 Groeneveld, M. Sc. Dennis +49 761 8857-154 Thin-film Gas Sensors PhD students Groten, Mag. rer. nat. Jonas 203-7406 Chemistry and Physics of Interfaces PhD students 102-00-208 Groß, Tobias MEMS Applications Master students 103-02-107 Grundmann, Ulrike 73212 MEMS Applications Secretary 103-02-204 (Anbau) Grötzinger, Katrin 73242 MEMS Applications Marketing 103-02-204 (Anbau) Grünwald, M. Eng. Waldemar +49 781 205-364 Electrical Instrumentation External PhD students Gschlecht, Carolin 7290 Assembly and Packaging Technology Secretary 103 01 027 Gueli, M.Sc Calogero 7299 Biomedical Microtechnology Scientific staff 102-00-077 Guevara Solarte, Diana Lorena +49 (0) 761 203-67466 Chemistry and Physics of Interfaces PhD students 102-00-208 Guevara-Solarete, Diana Lorena Polymer Synthesis and Surface Engineering Group PhD students Guidi, Dario 73277 MEMS Applications IT 103-02-105 98655 Electrical Instrumentation Secretary 010-01-012 Gundavarapu, Aditya Kumar Assembly and Packaging Technology Student assistants Gupta, B.Sc. Arkash Micro-optics Student assistants Guth, Manuel Electrical Instrumentation Student assistants Gutierrez Escobar, M. Sc. Sergio 67638 Electrical Instrumentation PhD students 106-04-003 Gutsch, Dr. Sebastian 7258 Nanotechnology Senior scientists 103-01-097 73254 MEMS Applications PhD students 103-00-210 (Anbau) 0761 203-67797 Process Technology Administration 103 02 086 Göppert, Timo Process Technology Student assistants Name Phone number Chair Function Email Office
Haase, Kai Simulation Student assistants Haensse, Robin Simulation Student assistants 7196 Microsystem Materials PhD students 103-00-092 Hahn, B.Sc. Benedikt Biomedical Microtechnology Student assistants Halfmann, M.A. phil. Marika 7490 Design of Microsystems Secretary 102-01-074 Haller, Yvonne 7159 Department of Microsystems Engineering IT 7551 Materials Processing Technology Director 102-02-088a +49 7803 9698-4465 Electrical Instrumentation External PhD students Hartleb, Wibke 203-7453 Chemistry and Physics of Interfaces PhD students 102-00-208 Hassler, Dipl.-Ing. Christina 0761-154339-0 Biomedical Microtechnology PhD students Hedinger, Mirjam 73202 MEMS Applications Administration 103-01 (Anbau) Hegge, Friedemann 95086 MEMS Applications PhD students 105-00-038 Hehn, Dr.-Ing. Thorsten +49 7721 943 163 Fritz Huettinger Chair of Microelectronics Group leaders 102-03-035 Heim, B. Sc. Christian Electrical Instrumentation Student assistants Heining, Dipl.-Biol. Katharina 67744 Biomicrotechnology PhD students 102-01-081 Helm, Jan-Hendrik 7428 Biomedical Microtechnology Bachelor students 102-00-055 Helmer, Dr. Dorothea Process Technology Postdocs 73267 MEMS Applications Postdocs 103-01 (Anbau) +49 (0) 761 203-95104 Chemistry and Physics of Interfaces Group leaders 105-02-037 Hergesell, Jan Biomedical Microtechnology Bachelor students 102-00-055 Hess, Tobias 7225 Optoelectronics Master students 103-01-034 Hess, Jacob 73247 MEMS Applications PhD students 103-00 (Anbau) Hess, M.Sc. Tobias +49 761 8857-260 Thin-film Gas Sensors PhD students Hiekel, Daniel 7220 Electrical Instrumentation Secretary 106-04-014 Electrical Instrumentation External PhD students 73251 MEMS Applications PhD students 103-01 (Anbau) Hofert, B.Sc. Milena Biomedical Microtechnology Student assistants 102-00-055 Hoffmann, Joscha Assembly and Packaging Technology Student assistants Hofmeier, Peter Systems Control and Optimization Student assistants 73256 MEMS Applications Group leaders 103-01 (Anbau) Honnef, Dr.-Ing. Kirsten 7554 Materials Processing Technology Senior scientists 102-02-088a 97531 Electrical Instrumentation Scientific staff 071 00 024 Hoppmann, Anselm 203-7182 Chemistry and Physics of Interfaces PhD students 102-00-208 Huai, M.Sc. Haosu 7294 Assembly and Packaging Technology Scientific staff 103 01 105 Huber, Johannes 7270 Sensors Technical staff 103-01-096 7208 Microsystem Materials Student assistants 103-00-69 Huber, Patrick +49 (0)761-203-95105 Chemistry and Physics of Interfaces PhD students 105-02-038 Huber, Dominik MEMS Applications Student assistants Hundrieser, Birgit 0761 8857-114 Optical Systems Secretary 73269 MEMS Applications Group leaders 103-01-101 (Anbau) Höffkes, Inga MEMS Applications Student assistants 7070 Electrical Instrumentation Group leaders 071-00-012 Assembly and Packaging Technology Ehemalige Doktorand (m/w) Hörmann, M.Sc. Johannes 67478 Simulation PhD students 103-03-029 Hügle, Matthias 7267 Sensors Group leaders 103-01-095 Name Phone number Chair Function Email Office
Ickler, Katja 7438 Microactuators Secretary 102 02 084 Ines-Santos, B.Sc. Ana 7383 Biomedical Microtechnology Master students 102-00-040 Itani, Ahmad MEMS Applications Master students Name Phone number Chair Function Email Office
Jaklin, B.Sc. Jan 7584 Design of Microsystems Scientific staff 102-01-213 Jamali, M.Sc. Armin 7508 Design of Microsystems Scientific staff 102-01-213 Jana, M.Sc. Richard 97784 Simulation PhD students 103-03-023 Jedrusik, M.Sc. Nicole Biomedical Microtechnology Scientific staff 102-00-Anbau 73276 MEMS Applications Postdocs Engesserstr. 4 Jeney, Dr. Csaba 54020 MEMS Applications Scientific staff 103 02 103 Jenne, Sophie MEMS Applications Student assistants Jiang, Nan Systems Control and Optimization Student assistants Microsystem Materials Student assistants Johannsen, Benita 7252 MEMS Applications PhD students 103-01 (Anbau) 7198 Microsystem Materials Technical staff 103-00-094 Joudy, M.Sc. Mohammad 203-67744 Biomicrotechnology Student assistants 102-01-81 Jödicke, M.Sc. Indre 97784 Simulation PhD students 103-03-023 Jörger, Thorbjörn 8104 Systems Control and Optimization Scientific staff Jülg, Peter 73279 MEMS Applications PhD students 103-00 (Anbau) 54206 Bio- and Nanophotonics Group leaders 102-01-089 Name Phone number Chair Function Email Office
Kainz, Daniel 73297 MEMS Applications PhD students 103 00 (Anbau) Kaku, Yumi 7208 Microsystem Materials Student assistants 103-00-069 Kalkreuth, Jonas MEMS Applications Student assistants 4745 Sensors PhD students FMF-02-055 Kanokwijitsilp, Thananthorn +49 (0) 761 203-7169 Chemistry and Physics of Interfaces PhD students 103-00-099 Kao, Yu-Ting 98732 MEMS Applications Visiting researchers 103-01(Anbau) Kapp, B. Sc. Johannes +49 761 203-67453 Thin-film Gas Sensors Student assistants 102-00-026 Kar, Bibhu Prasanna 7435 Microactuators Scientific staff 102 02 081 Karkossa, Lena MEMS Applications Student assistants 73224 MEMS Applications Postdocs 103-01-210 (Anbau) 73287 MEMS Applications Group leaders 103 02 101 Kathrin, König Sensors Student assistants 103-01-094 Katliar, Mikhail Systems Control and Optimization External PhD students 7560 Micro-optics Secretary 102-02-074 Kauzlaric, Dr. David 67481 Simulation Postdocs 103-03-023 7597 Fritz Huettinger Chair of Microelectronics Group leaders 102-03-031 Keller, Stefan (Fraunhofer-Institut Solare Energiesysteme) Fritz Huettinger Chair of Microelectronics External PhD students Keller, Mark Assembly and Packaging Technology Student assistants Khan, Zeba MEMS Applications Student assistants Khatri, Rahul MEMS Applications Student assistants 103-00 (Anbau) Khosrownejad, Dr. Mostafa 97784 Simulation Postdocs 103-03-023 Electrical Instrumentation External PhD students Kieferle, Mirjam MEMS Applications Student assistants Kiele, M.Sc. Patrick 67499 Biomedical Microtechnology Scientific staff 102-00-208 Anbau 7265 Sensors Senior scientists 103-01-094 Kieninger, Gaby 67887 Systems Control and Optimization Secretary 102-01-207 Kimmig, M.Sc. Fabian 0761-154339-0 Biomedical Microtechnology PhD students 73217 MEMS Applications Scientific staff 103-01 (Anbau) Kirschenbauer, Steve Microsystem Materials Student assistants Kis, Zsolt 73285 MEMS Applications IT 103-02-105 Klar, Lukas Systems Control and Optimization Student assistants Klatt, Jan-Niklas 73249 MEMS Applications PhD students 103-00 (Anbau) Kleber, M.Sc. Carolin 67466 Biomedical Microtechnology PhD students Klefisch, Nadine 73275 MEMS Applications Administration 103-01 (Anbau) 7201 Microsystem Materials PhD students 103-01-103 Klein, Eric 7225 Optoelectronics Master students 103-01-035 MEMS Applications Postdocs Klose, Carolin 54062 MEMS Applications PhD students 103 00 (Anbau) 7190 Microsystem Materials Secretary 103-00-088 Knopf, Thorsten MEMS Applications Technical staff 98592 Biomedical Microtechnology Scientific staff 071-00-03.5 73253 MEMS Applications PhD students 103 02 101 Koch, Philip 54018 MEMS Applications Scientific staff Engesserstr. 4/1 Koch, Susanne 54069 MEMS Applications PhD students 103 00 (Anbau) Kohler, Dr.-Ing. Fabian 0761-897694550 Biomedical Microtechnology Visiting researchers 071-00 Kohler, B.Sc. Alina Biomedical Microtechnology Student assistants 102-00-060 7317 Assembly and Packaging Technology Scientific staff 103 01 105 Kojima, Dr. Taisuke +49 (0) 761 203-7169 Chemistry and Physics of Interfaces Postdocs 103-00-099 Electrical Instrumentation External PhD students Kolhep, M.Sc. Maximilian 7118 Nanotechnology PhD students 104 01 005 73240 MEMS Applications Senior scientists 103-02-213 (Anbau) Kondrashov, Vitaliy 203-7167 Chemistry and Physics of Interfaces PhD students 103-00-101 Kost, Jonas +49 (0) 761 203-95156 Chemistry and Physics of Interfaces PhD students 105-02-039 Kotthaus, Krishan 7268 Sensors Student assistants 103-01-095 Kotz, Dr. Frederik Process Technology Postdocs Krauskopf, B.Sc. Thomas Biomedical Microtechnology Master students Krawat, M. Sc. Daniel 67554 Fritz Huettinger Chair of Microelectronics Scientific staff 102-02-215 Kroyer, Wieslawa -98584 Department of Microsystems Engineering Secretary 106-04-012 Krämer, M. Eng. Axel Electrical Instrumentation External PhD students 7253 Process Technology Visiting researchers 103-02-097 Kuderer, Dipl.-Ing. Markus 7599 Fritz Huettinger Chair of Microelectronics Scientific staff 102-03-036 Kuehn, M. Sc. Jan 67557 Fritz Huettinger Chair of Microelectronics Scientific staff 102-02-211 Kunz, Thomas Electrical Instrumentation Student assistants Kurowska, Monika +49 (0) 761 203-67467 Chemistry and Physics of Interfaces PhD students 102-00-208 Kurowska, Monika Polymer Synthesis and Surface Engineering Group PhD students Kurz, M.Sc. Nicolas 0761 5159-263 Compound Semiconductor Microsystems PhD students Kutluk, Hazal 7264 Sensors Scientific staff 103-01-092 7208 Microsystem Materials Student assistants 103-00-069 Kuwahara, Dr. Takuya Simulation Postdocs 7531 Bio- and Nanophotonics PhD students 102-01-088b +49 761 8857-329 Thin-film Gas Sensors Visiting researchers Körner, Martin +49 (0) 761 203-95159 Chemistry and Physics of Interfaces PhD students 106-02-040 Kühnle, Harald 73234 MEMS Applications Technical staff 104 02 Name Phone number Chair Function Email Office
Labonia, Maria Clara MEMS Applications Master students Lachner Piza, M.Sc. Daniel Biomedical Microtechnology External PhD students Lago Garcia, Jesus Systems Control and Optimization Student assistants Electrical Instrumentation External PhD students Lall, B.Sc. Jasleen Kaur 7575 Micro-optics PhD students 102-02-075 4781 Sensors Master students Lang, Benjamin Gregory Electrical Instrumentation Student assistants Langenmair, M.Sc. Michael 98593 Biomedical Microtechnology Scientific staff 102-00-081 Larochelle, Jonathan Biomedical Microtechnology Other students 102-00-055 Laubender, Elmar 4781 Sensors Scientific staff FMF-03-061 Laufer, M. Sc. Bernhard +49-7720-3074621 Electrical Instrumentation External PhD students 67468 Biomedical Microtechnology Scientific staff 102-00-208 Anbau 7269 Sensors Group leaders 103-01-096 Lehmann, Nico 7069 Clean Room Service Center Technical staff 104-02-017 Lehmann, Nico MEMS Applications Technical staff Engesserstr. 4 73229 MEMS Applications Postdocs 103-01 (Anbau) Leicht, Dipl.-Ing. (FH) Joachim 67549 Fritz Huettinger Chair of Microelectronics Scientific staff 102-02-217 7408 Microactuators PhD students 102 02 081 Leute, M.Sc. Richard 67726 Simulation PhD students 103-03-020 Leuthold, Rachel Systems Control and Optimization PhD students Li, Ke 203-7169 Chemistry and Physics of Interfaces PhD students 103-00-099 Li, Xiaoming (Daimler AG) Fritz Huettinger Chair of Microelectronics External PhD students +49 (0) 761 203-7415 Chemistry and Physics of Interfaces Group leaders 102-00-209 Lienkamp, Dr. Karen Polymer Synthesis and Surface Engineering Group Director Lintao, Fang Simulation Student assistants Liolios-Zimmermann, Anna 67723 Simulation Administration 103-03-017 Littwin, Alexander Department of Microsystems Engineering IT 54068 MEMS Applications Scientific staff 103-00 Lozano-Zahonero, M Sara 076127023080 Biomedical Microtechnology External PhD students Luongo, Anna +49 (0)761 203-7168 Chemistry and Physics of Interfaces PhD students 103-00-101 Lyu, B.Sc. Xuemeng +49 761 203-97632 Thin-film Gas Sensors Master students 102-00-085 Löwe, M.Sc Robert Materials Processing Technology PhD students Lüddecke, Dr. Jan 73258 MEMS Applications Postdocs 103 01 (Anbau) Name Phone number Chair Function Email Office
Machado Vieira, M.Sc. Diego 203-67744 Biomicrotechnology PhD students 102-01-081 Madurai Geetha Rama Sudhakar, Shri Ganesh +49 162 834 9400 Electrical Instrumentation Student assistants Mai, Max MEMS Applications Student assistants Maier, M.Sc. Lena Maria +49 761 8857-305 Thin-film Gas Sensors PhD students Malasani Santhosh Kumar, Shreyas Sensors Student assistants 103-01-92 Malek-Luz, Dr. Alicia Chemistry and Physics of Interfaces Postdocs 102-00-208 Malek-Luz, Dr. Alicia Polymer Synthesis and Surface Engineering Group Postdocs Mamouda, M.Sc. Mohamadou Awal 7247 Biomedical Microtechnology Technical staff 102-00-208 Anbau Manna, Dr. Suman Bio- and Nanophotonics Postdocs 7590 Fritz Huettinger Chair of Microelectronics Director 102-03-023 Biomedical Microtechnology External PhD students Marazita, Martin 203-7169 Chemistry and Physics of Interfaces PhD students 103-00-099 Martens, Benedict 7268 Sensors Student assistants 103-01-095 Martin, Günter 7071 Department of Microsystems Engineering Technical staff Marx, M. Sc. Maximilian 67553 Fritz Huettinger Chair of Microelectronics Scientific staff 102-02-215 Electrical Instrumentation External PhD students Mauck, Markus Process Technology PhD students Maurer, Dr.-Ing. Michael 7585 Fritz Huettinger Chair of Microelectronics Scientific staff 102-03-036 Mayer, Dr. Elena Electrical Instrumentation Visiting researchers 106-04-005 Mayoussi, Fadoua Process Technology PhD students Medesi, Dipl.-Chem. Anna Materials Processing Technology Scientific staff Mees, M.Sc. Jan 67478 Simulation PhD students 103-03-029 Menzel, Matthias +49 (0) 761 203-7169 Chemistry and Physics of Interfaces Postdocs 103-00-099 Messerer, Florian Systems Control and Optimization Student assistants Metzler, Lukas +49 (0) 761 203-7169 Chemistry and Physics of Interfaces PhD students 103-00-099 Meyer, Martin 73296 MEMS Applications PhD students Engesserstr. 4, 1.OG Meyer, Jonas Biomedical Microtechnology Bachelor students 102-00-060 7534 Bio- and Nanophotonics Postdocs 102-01-089 Minet, M.Sc. Yannick 97944 Optical Systems PhD students 102-00-088 Minet, M.Sc. Yannick 97944 Micro-optics External PhD students 102-00-088 73252 MEMS Applications Group leaders 103-01 (Anbau) Mittnacht, M.Sc. Annette Biomedical Microtechnology Student assistants 102-00-060 Mohseni Mofidi, Seyyid Shoya Simulation External PhD students Mokhtarifar, M.Sc Naser 67491 Design of Microsystems PhD students 102-01-075 Montano Crespo, B.Sc. Ruth Eneida 203-67744 Biomicrotechnology Master students 102-01-81 95087 MEMS Applications PhD students 105-00-038 Moumen , Dipl.-Ing. Sarra Thin-film Gas Sensors External PhD students Mounir, M.Sc. Christian 7225 Optoelectronics PhD students 103-01-103 Muralidharan, Harshini Sensors PhD students Mutter, Frank Joachim Electrical Instrumentation Bachelor students Mössner, Daniela +49 (0) 761 203-8138 Chemistry and Physics of Interfaces Technical staff 078-00-033b 7354 Process Technology Senior scientists 103-02-088 Müller, Guido 73248 MEMS Applications Technical staff 103-00-210 (Anbau) 7579 Microactuators Postdocs 102 02 083 Müller, Lara MEMS Applications Master students 103-01 (Anbau) 7354 Mechanical Mirco-Production Service Center Director Müller, Tanja MEMS Applications Student assistants Müllers, Stefan +49 (0) 761 203-95159 Chemistry and Physics of Interfaces PhD students 105-02-040 Name Phone number Chair Function Email Office
Nabakowski, Clarissa MEMS Applications Student assistants 54023 MEMS Applications PhD students 103-00 (Anbau) +49 761 4588-5431 Electrical Instrumentation External PhD students Neßler, M. Sc. Sebastian 67550 Fritz Huettinger Chair of Microelectronics Scientific staff 102-02-211 Nickel, Stephan +49 761 203-67453 Thin-film Gas Sensors Student assistants 102-00-026 Niebling, Laura 73250 MEMS Applications Scientific staff 103-02 Nitzsche, M.Sc. Ponkanok +49 761 203-96808 Thin-film Gas Sensors PhD students 102-00-086 Nitzsche, M.Sc. Leonard +49 761 8857-710 Thin-film Gas Sensors PhD students Nöhring, Dr. Wolfram 97785 Simulation Postdocs 103-03-027 Nötzel, Dipl.-Min. Dorit Materials Processing Technology PhD students Name Phone number Chair Function Email Office
Oerding, M.A. Marion 7521 Biomicrotechnology Secretary 102-01-083 Ohnemus, Max MEMS Applications Student assistants 7523 Biomicrotechnology Group leaders 102-01-084 Olcaytug, Prof. Dr. Fethi Sensors Visiting researchers Ortiz Perez, M.Sc. Alvaro +49 761 203-97632 Thin-film Gas Sensors PhD students 102-00-085 7298 Electrical Instrumentation Postdocs 106-04-003 7199 Microsystem Materials Postdocs 103-00-095 4755 (FMF) Sensors Group leaders 103-1-110, FMF-2-061 Osterwinter, Gregor 203-7167 Chemistry and Physics of Interfaces PhD students 103-00-101 7193 Microsystem Materials PhD students 103-00-088a Name Phone number Chair Function Email Office
Paasch, Christine 67849 Systems Control and Optimization Secretary 102-01-207 +49 761 203-67583 Thin-film Gas Sensors Visiting researchers 102-00-086 Pandiyarajan, C.K. 203-7168 Chemistry and Physics of Interfaces PhD students 203-00-101 Parasuraman, Suresh Dharani Assembly and Packaging Technology Student assistants 7251 Biomedical Microtechnology Group leaders 102-00-208 Anbau 67480 Simulation Director 103-03-014 7191 Microsystem Materials Director 103-00-084 73245 MEMS Applications Group leaders 103-02 (Anbau) 7503 Design of Microsystems Group leaders 102-01-217 Pentyala, Venkateswarlu Sensors External PhD students Perez, Jose Biomedical Microtechnology Other students Peter, Constantin Electrical Instrumentation Student assistants Petrov, Aleksandar Systems Control and Optimization Student assistants Petrov, B. Sc. Alexander Electrical Instrumentation Student assistants Pfau, M.Sc. Jennifer 7297 Biomedical Microtechnology Scientific staff 102-00-081 Pham, Dr. Van Chuyen 95081 MEMS Applications Postdocs 105-00-036 Pierre, Volber 4781 Sensors Student assistants Pietz, Dominic Systems Control and Optimization Student assistants Plachta, Dr. rer. nat. Dennis 0761-154339-0 oder 0761-270-93390 Biomedical Microtechnology Visiting researchers 102-00-077 Pritzkat, Christa 0761 203-7470 Biomedical Microtechnology Secretary 102-00-075 Probst, Sophia MEMS Applications Master students +49 (0) 761 203-7164 Chemistry and Physics of Interfaces Group leaders 103-00-105 Purkl, Fabian Sensors External PhD students Päusch, B. Sc. Simon Electrical Instrumentation Student assistants Name Phone number Chair Function Email Office
Qazzazie, M.Sc Afnan Materials Processing Technology PhD students 102-02-088b 0761 5159-843 Compound Semiconductor Microsystems Senior scientists Quirynen, Rien 73278 Systems Control and Optimization Visiting researchers 102-01-211 Name Phone number Chair Function Email Office
Raimann, Philipp Assembly and Packaging Technology Student assistants Rajaeipour, M.Sc. Pouya 7518 Micro-optics PhD students 102-02-079 Ramos, Bryan Simulation Student assistants Ramos Maldonado, B. Sc. Bryan Marcos Electrical Instrumentation Student assistants 7210 Microsystem Materials Student assistants 103-00-069 Rao, Vanditha MEMS Applications Student assistants Rao, Vanditha Electrical Instrumentation Student assistants Rapp, Prof. Dr. -Ing. habil. Bastian E. Process Technology Director Raum, Madlen 7267 Sensors Bachelor students 103-01-095 Reichel, Dipl.-Ing. (FH) Michael 7068 Clean Room Service Center Technical staff 104-02-017 Reichler, Tobias Microsystem Materials Student assistants Reimer, Julian Systems Control and Optimization Student assistants 73236 MEMS Applications Technical staff Engesserstr. 4 7221 Electrical Instrumentation Director 106-04-015 Reindl, Anna Electrical Instrumentation Student assistants Reis, Luís 98661 Optical Systems Master students 102-00-087 Reisacher, Dipl.-Phys. Markus 0761 5159-228 Compound Semiconductor Microsystems PhD students 7353 Process Technology PhD students 103-02-097 Rendl, Diplom-Ing. Martin 203-7308 Chemistry and Physics of Interfaces PhD students 102-00-208 Reusch, M.Sc. Markus 7184 Compound Semiconductor Microsystems PhD students 103-01-102 Riba, Julian 73216 MEMS Applications Visiting researchers 103-03 Richardt, Franz 7500 Design of Microsystems Technical staff 102-01-078 Richter, Maxi Process Technology External PhD students 7232 Electrical Instrumentation PhD students 106-03-011 Riede, Ute 7527 Biomicrotechnology Technical staff 102-01-031 Riede, Ute 7383 oder 7527 Biomedical Microtechnology Technical staff 102-00-31;102-01-033 Riga, Esther +49 (0) 761 203-95094 Chemistry and Physics of Interfaces PhD students 105-01-025 Riga, Esther Polymer Synthesis and Surface Engineering Group PhD students Risch, Patrick Process Technology Scientific staff Ristani , Sildona Microactuators Visiting researchers Robelin, Christelle 73286 MEMS Applications Group leaders 103-02-204 (Anbau) Robinson, Stephen MEMS Applications External PhD students 103-03 Rodríguez Flores, M.Sc. Esther 203-7523 Biomicrotechnology PhD students 01-084 7536 Bio- and Nanophotonics Director 102-01-087 73222 MEMS Applications Group leaders 103-01-210 (Anbau) Rosch, Elias Systems Control and Optimization Student assistants 8527 Fritz Huettinger Chair of Microelectronics Scientific staff 102-03-036 7531 Bio- and Nanophotonics PhD students 102-01-017 Rother, Raimund 54017 MEMS Applications Scientific staff Engesserstr. 4/1 Rothfelder, Marcel 203-7169 Chemistry and Physics of Interfaces PhD students 103-00-099 7548 Bio- and Nanophotonics Administration 102-01-026 Rudmann, M.Sc. Linda 7433 Biomedical Microtechnology Scientific staff 102-00-081 Rusitov, Dennis +49 (0)761-203-95105 Chemistry and Physics of Interfaces PhD students 105-02-038 7197 Microsystem Materials Group leaders 103-00-094 Rutquist, Per Systems Control and Optimization Scientific staff 73239 MEMS Applications Technical staff 104 02 Röttger, Dr. Michael 67726 Simulation Postdocs 103-03-020 Rüdiger, Julian 98720 MEMS Applications PhD students +49 (0) 761 203-7161 Chemistry and Physics of Interfaces Director 103-00-109 Rüppell, M.Sc. Maximilian 67744 Biomicrotechnology PhD students 102-01-081 Name Phone number Chair Function Email Office
Saar, Julia Polymer Synthesis and Surface Engineering Group PhD students Saar, Julia +49 (0) 761 203-7454 Chemistry and Physics of Interfaces PhD students 102-00-208 Saberi , M.Sc. Mohammadreza Design of Microsystems Scientific staff Safavieh, M.Sc. Seyedehsan 67744 Biomicrotechnology PhD students 102-01-081 Sahebdivani, Mahsa MEMS Applications Visiting researchers Salou, B.Sc. Mohamed Simulation Student assistants 67556 Fritz Huettinger Chair of Microelectronics Group leaders 102-02-215 Sanner, M.Sc. Antoine 67726 Simulation PhD students 103-03-020 Saphala, B. Sc. Addythia Electrical Instrumentation Master students Sardana, Pranshul MEMS Applications Student assistants Sartor, Tommaso Systems Control and Optimization Scientific staff Satya Murthy, Nitish Simulation Student assistants Sauther, Martin Microactuators Student assistants Sauther, B.Sc. Martin Micro-optics Student assistants 8341 Electrical Instrumentation PhD students 106 04 012 7200 Microsystem Materials PhD students 103-00-095 Schaechtle, M. Sc. Thomas 7223 Electrical Instrumentation PhD students 106-03-003 Schatz, Natalia +49 (0) 761 203-7176 Chemistry and Physics of Interfaces Technical staff 103-00-043 Assembly and Packaging Technology External PhD students Assembly and Packaging Technology External PhD students +49 (0) 761 203-67469 Chemistry and Physics of Interfaces Postdocs 102-00-208 Schiedel, Larissa MEMS Applications Student assistants Schierle, M.Sc. Stefan 7401 Design of Microsystems PhD students 102-01-075 Schiffmacher, M.Sc. Alexander 7295 Assembly and Packaging Technology Scientific staff 103 01 107 Schiller, M.Sc. Annelie 0761 8857-303 Optical Systems External PhD students Schillinger, M. Sc. Daniel 67547 Fritz Huettinger Chair of Microelectronics Scientific staff 102-02-211 Schlagenauf, Jonas Systems Control and Optimization Scientific staff Schlanderer, Judith 73270 MEMS Applications PhD students 103 00 (Anbau) Schlecker, Dipl.-Ing. Rolf 7478 Fritz Huettinger Chair of Microelectronics Technical staff 102-03-033 Schlenker, Franziska 73203 MEMS Applications PhD students 103-00 (Anbau) Schleusener, Benedikt Systems Control and Optimization Student assistants Schleusener, Benedikt Electrical Instrumentation Student assistants Schmid, Heidi +49 761 203-54198 Thin-film Gas Sensors Secretary 102-00-086 Schmid, Max Process Technology Scientific staff Schmitt, Dr. Katrin +49 761 203-67583 Thin-film Gas Sensors Senior scientists 102-00-086 Schneider-Chaabane, Alexandra Polymer Synthesis and Surface Engineering Group PhD students Scholz, B.Sc. Daniel Biomedical Microtechnology Master students 7355 Process Technology Senior scientists 103-02-092 7185 Electrical Instrumentation PhD students 071-00-021 Schropp, M.Sc. Beatrice Biomedical Microtechnology Administration 7305 Process Technology Visiting researchers 103-02-096 Schulz, Martin 98731 MEMS Applications PhD students 103-01-101 (Anbau) Schwarz, Prof. Dr. Ulrich T. 0761 5159-513 Optoelectronics Director 73280 MEMS Applications Scientific staff 103-00 Schwenteck, Sarah +49 (0) 761 203-7173 Chemistry and Physics of Interfaces Interns 103-00-033 Schölch, Simon +49 (0)761-203-7406 Chemistry and Physics of Interfaces PhD students 102-00-208 Schöls, Tobias Systems Control and Optimization External PhD students Schönstein, Martin +49 (0) 761 203-7172 Chemistry and Physics of Interfaces Technical staff 103-00-032 Schöpflin, Matthias 7102 Nanotechnology Student assistants 104 01 055 Schöpflin, B.Sc. Matthias 7102 Nanotechnology Student assistants 104 01 055 Schüler, Marc Andre 7264 Sensors Student assistants 103-01-092 0761 89 76 94 512 Biomedical Microtechnology Visiting researchers 072-00 Seibel, Colin 7267 Sensors Master students 103-01-095 Seifaei, M. Sc. Masoud 67561 Fritz Huettinger Chair of Microelectronics Scientific staff 102-02-217 Shabanian, M.Sc. Ardavan 67676 Design of Microsystems PhD students 102-01-079 Shams, Behrokh 7265 Sensors Student assistants Shanahan, Brian 95084 MEMS Applications PhD students 103 00 (Anbau) 67467 Biomedical Microtechnology Scientific staff Sharbatian, M.Sc. Ali Biomedical Microtechnology PhD students 102-00-78 7196 Microsystem Materials PhD students 103-00-092 Sheeja Prakash, M.Sc. Karthika 67490 Design of Microsystems PhD students 102-01-075 97761 Electrical Instrumentation PhD students 106-03-003 Shilikhina, Polina Electrical Instrumentation Student assistants 071-00-015 Shinde, Uttunga Gopal Sensors Student assistants 54057 MEMS Applications Postdocs 103-02-107 Shui, Dipl.-Ing. Boyu 7588 Fritz Huettinger Chair of Microelectronics Scientific staff 102-03-030 Sieg, Christoph Systems Control and Optimization Scientific staff Siegel, Lara 7267 Sensors Student assistants 103-01-095 Simon, Kuhn Process Technology Master students 7207 Microsystem Materials Student assistants 103-00-62 Soballa, Melanie MEMS Applications Student assistants 95084 MEMS Applications PhD students 105 00 036 Somerlik-Fuchs, Dipl.-Ing. Karin 270-50074 Biomedical Microtechnology External PhD students 7371 Process Technology Technical staff 103-02-095 Song, Xiayingfang Assembly and Packaging Technology Student assistants 95083 MEMS Applications Postdocs 103-01 (Anbau) Spessert, Leon MEMS Applications Master students Engesserstr.4, 1. OG Spitzmüller, Frank 7061 Clean Room Service Center Technical staff Spohn, Dr. Lucas 96891 Fritz Huettinger Chair of Microelectronics Scientific staff 102-03-036 Starke, Marina 54017 MEMS Applications Bachelor students Steffen, Dipl. Chem. Kay 7365 Process Technology Technical staff 103-02-069 Steinmann, B. Sc. Till Electrical Instrumentation Student assistants Stevens, Dr. Gregory Sensors Visiting researchers Stieglitz, Prof. Dr. Thomas 7471 Biomedical Microtechnology Director 102-00-073 Stobbe, Dr. rer. nat. Nina 67462 Biomedical Microtechnology Administration 102-00-208 Anbau Stork, Hans Rainer 7475 Design of Microsystems Administration 102-01-079 Stork, M.Sc. David 97533 Design of Microsystems Scientific staff 102-01-077 Strahringer, B.Sc. David Assembly and Packaging Technology Student assistants Straub, Alexander +49 (0) 761 203-7169 Chemistry and Physics of Interfaces PhD students 103-00-099 Straub , Paula +49 (0)761-203-95155 Chemistry and Physics of Interfaces PhD students 105-02-038 73205 MEMS Applications Group leaders Engesserstr. 4, 1.OG 7248 Process Technology Technical staff 103-02-098 7248 & 95125 Mechanical Mirco-Production Service Center Technical staff 105-02-026 Stumpf, Anne +49 (0) 761 203-7308 Chemistry and Physics of Interfaces Postdocs 102-00-208 Sturman, Prof. Boris 98661 Optical Systems Visiting researchers 102-00-087 Stöckl, Vanessa Electrical Instrumentation Student assistants 7157 Electrical Instrumentation PhD students 106-04-004 7296 Assembly and Packaging Technology Scientific staff 103 01 107 Subhash, M.Sc. Swathi Krishna Design of Microsystems PhD students 7131 Microactuators Postdocs 102-02-040 Szabados, M.Sc. Jan Peter 97944 Optical Systems PhD students 102-00-088 Szabo, B.Sc. Benedikt 7428 Biomedical Microtechnology Master students Name Phone number Chair Function Email Office
Tadić-Puzigaća, B.A. Aleksandra 7420 Nanotechnology Administration 103-01-101 Talebi, M.Sc. Mohammadmahdi 67493 Design of Microsystems PhD students 102-01-077 Tamilselvi Sundaram, Vinayaganataraj Sensors Student assistants Tarantik, Dr. Karina +49 761 8857-730 Thin-film Gas Sensors Visiting researchers Taschwer, Dipl.-Ing. Armin 67555 Fritz Huettinger Chair of Microelectronics Scientific staff 102-03-036 Tengse, Prasad Electrical Instrumentation Student assistants Tepper, Philipp 73273 MEMS Applications PhD students Engesserstr. 4, 1.OG Thaden, Ole MEMS Applications Bachelor students Thiemann, Kerstin MEMS Applications Master students 103 02 106 Thies, Jutta 7590 Fritz Huettinger Chair of Microelectronics Secretary 102-03-025 Tianyang, Zheng +49 (0) 761 203-67463 Chemistry and Physics of Interfaces PhD students 102-00-208 67363 Sensors Bachelor students 101-01-110 Tritz, Florian +49 (0)761-203-67463 Chemistry and Physics of Interfaces PhD students 102-00-208 73225 MEMS Applications PhD students 103-01 (Anbau) 73228 MEMS Applications PhD students 103-02-107 0761-4588-5488 Electrical Instrumentation External PhD students 98734 MEMS Applications Postdocs 103 03 Tudja, M.A. Szabina 203-7523 Biomicrotechnology PhD students 102-01-084 Ture, M.Sc. Erdin 0761 5159-249 Compound Semiconductor Microsystems PhD students Tülümen, M. Sc. Metin Materials Processing Technology External PhD students KIT Name Phone number Chair Function Email Office
7534 Bio- and Nanophotonics PhD students 102-01-088a Uluda, Macit 97944 Optical Systems Master students 102-00-088 7224 Electrical Instrumentation Group leaders 071-00-017 7260 Sensors Director 103-01-084 Urban, Sebastian 7277 Sensors PhD students 103-01-071 Name Phone number Chair Function Email Office
Vasilas, Ioana-Georgiana Biomedical Microtechnology Other students 102-00-040 Veh, Philipp MEMS Applications Student assistants 73260 MEMS Applications Postdocs 103-02-107 54060 MEMS Applications Group leaders 103 00 (Anbau) Vilches Exposito, M.Sc. Sergio 7573 Micro-optics PhD students 102-02-075 Virks, Niklas MEMS Applications Student assistants 54041 Biomedical Microtechnology Scientific staff 071-00-03.4 Vöhringer, Maria Polymer Synthesis and Surface Engineering Group PhD students Name Phone number Chair Function Email Office
7580 Microactuators Director 102 02 085 Wandt, Dr. Michael 7064 Clean Room Service Center Director 104-02-017 Wang, M.Sc. Ziyu 7574 Micro-optics PhD students 102-02-077 Wang, M.Sc. Xi 0761 207-93280 Biomedical Microtechnology External PhD students 101-01-123 Wang, M. Sc Zhengqi Materials Processing Technology PhD students KIT Wang, M.Sc. Guoliang 7519 Micro-optics PhD students 102-02-079 7582 Microactuators Group leaders 102 02 083 Weber, Pascal Microactuators Student assistants Weber, Lucca 98722 MEMS Applications Scientific staff 7208 Microsystem Materials Master students 103-00-069 Weber, M.Sc. Christian +49 761 203-97632 Thin-film Gas Sensors PhD students 102-00-026 +49 7441 4010212 Electrical Instrumentation External PhD students Weinreich, Tobias Systems Control and Optimization Student assistants 98729 MEMS Applications Postdocs 103-00 (Anbau) Weisshap, B.Sc. Marius Biomedical Microtechnology Student assistants Weiß, Vanessa +49 (0) 761 203-7173 Chemistry and Physics of Interfaces Interns 103-00-033 Welsch, Bruno 7411 Department of Microsystems Engineering IT 074-00-021 Weltin, Dr.-Ing. Andreas 7263 Sensors Group leaders 103-01-092 Wendler, M. Sc. Daniel 67562 Fritz Huettinger Chair of Microelectronics Scientific staff 102-03-029 Wenke, Nils MEMS Applications Student assistants Weygant , Joshua MEMS Applications Student assistants Wickli, Natalie MEMS Applications Student assistants Widyaya, Vania Tanda +49 (0) 761 203-7453 Chemistry and Physics of Interfaces PhD students 102-00-208 Widyaya, Vania Polymer Synthesis and Surface Engineering Group PhD students Wieland, Tobias 7268 Sensors PhD students 103-01-095 7291 Assembly and Packaging Technology Director 103 01 106 Wiloth, Petra +49 (0) 761 203-7170 Chemistry and Physics of Interfaces Secretary 103-00-107 Wissmann, Peter 7045 Department of Microsystems Engineering Technical staff 104-02 Wissmann, Peter 7045 Mechanical Mirco-Production Service Center Technical staff 104-01-017 Witt, Martin 7045 Mechanical Mirco-Production Service Center Technical staff Woias, Prof. Dr.-Ing. Peter 7490 Design of Microsystems Director 102-01-073 Wolf, Michael 73266 MEMS Applications Scientific staff 103 01 (Anbau) Woods, Joshua 7383 Biomedical Microtechnology Other students 102-00-040 Wu, B. Sc. Hanlu Electrical Instrumentation Student assistants 106-04-012 Wölfle, Dipl.-Ing (FH) Michael 7364 Process Technology Technical staff 103-02-069 Wölfle, Dipl.-Ing (FH) Michael 7364 Mechanical Mirco-Production Service Center Technical staff 103-02-069 Wöllenstein, Prof. Dr. Jürgen +49 761 8857-134 Thin-film Gas Sensors Director 102 Name Phone number Chair Function Email Office
Yadav, Ruchi Sensors Student assistants Yassine, B. Sc. Hassan +49 761 203-67453 Thin-film Gas Sensors Master students 102-00-026 Yavuz, Cansu MEMS Applications Student assistants Yazicioglu, M. Sc. Deniz 7101 Nanotechnology PhD students 103 01 097 Yildirim, M.Sc. Kevser 0761-154339-0 Biomedical Microtechnology PhD students Yurchenko, Dr. Olena 4781 Sensors Group leaders FMF-03-061 Name Phone number Chair Function Email Office
Zacharias, Prof. Dr. Margit 7421 Nanotechnology Director 103-01-099 Zanelli, Andrea Systems Control and Optimization PhD students 7561 Micro-optics Director 102-02-073 73200 MEMS Applications Director 103-02-210 (Anbau) Zengerle, Dr. Ursula 73268 MEMS Applications Marketing 103-02-204 (Anbau) 7519 Micro-optics Postdocs 102-02-079 Zhao, Bin Process Technology Master students 02 097 Zhao, M.Sc. Bin Nanotechnology PhD students 104 01 005 73283 MEMS Applications Group leaders 103 02 101 Zinggeler, Marc +49 (0) 761 203-67464 Chemistry and Physics of Interfaces PhD students 102-00-208 Ziser, Yvonne 73233 MEMS Applications Technical staff 103-02-099 Zou, Peng 203-67466 Chemistry and Physics of Interfaces PhD students 102-00-208 Zouridaki, Antigoni 73200 MEMS Applications Secretary 103-02 (Anbau) Zunker, Simon +49 (0) 761 203-95159 Chemistry and Physics of Interfaces PhD students 105-02-040 Zöllin, M.Sc. Marc 67675 Design of Microsystems PhD students 102-01-077 Name Phone number Chair Function Email Office
von Holst, Miriam MEMS Applications Student assistants 73243 MEMS Applications Senior scientists 103-02 (Anbau)
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